Cleaning apparatus and cleaning method

ABSTRACT

A washing device includes: a plurality of spindles which holds a substrate and rotates the substrate about a central axis of the substrate as a rotary axis; and a single tube nozzle which discharges a washing liquid toward an upper surface of the substrate, wherein the single tube nozzle discharges the washing liquid so that the washing liquid lands in front of the center of the substrate and the landed washing liquid flows on the upper surface of the substrate toward the center of the substrate. A liquid flow on the upper surface of the substrate after landing of the washing liquid discharged from the single tube nozzle passes through the center of the substrate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of Japanese Priority PatentApplication JP 2014-075712 filed on Apr. 1, 2014, the entire contents ofwhich are incorporated herein by reference.

FIELD

The present technique relates to a washing device and a washing methodwhich wash a substrate, while supplying a washing liquid to a surface ofthe substrate such as a rotating semiconductor wafer.

BACKGROUND AND SUMMARY

In a manufacturing process of a substrate such as a semiconductor wafer,a polishing step of polishing a film of a metal or the like formed onthe substrate is included, and after the polishing step, washing forremoving fine particles as polishing chips is performed. For example, ina damascene wiring forming step of forming a wiring by embedding awiring groove formed inside an insulating film of the substrate surfacewith metal, excess metal of the substrate surface is polished andremoved by chemical mechanical polishing (CMP) after forming thedamascene wiring. Since particles (defect), such as residues of theslurry (slurry residues) or metal polishing chips used in the CMP, arepresent on the substrate surface after the CMP, it is necessary toremove these by washing.

When the residues remain on the substrate surface due to theinsufficient washing of the substrate surface, there is a problem interms of reliability, such as an occurrence of leakage from theremaining portion of the residues on the substrate surface, or the causeof adhesion failure. Therefore, it is necessary to wash the substratesurface, from which a metal film, a barrier film, an insulating film orthe like is exposed, with high washing degree. In recent years, with theminiaturization of semiconductor devices, the diameter of particles tobe removed has decreased, and the request for washing has also becomestrict.

As a washing method after the polishing in the CMP device, washing usinga roll washing member, washing using a pencil washing member, washingusing a two-fluid nozzle and the like have been known. In these types ofwashing, the substrate is rotated about its central axis, and a chemicalliquid and a rinse liquid (hereinafter, the chemical liquid and therinse liquid are collectively referred to as a “washing liquid”) aresupplied to the surface (upper surface) of the substrate. Moreover, inthese types of washing, after the washing (chemical liquid washing) isperformed by the action of the roll washing member, the pencil washingmember and the two-fluid nozzle, at least the rinse liquid is suppliedas a washing liquid, and the washing (rinsing washing) performed withoutthe action of the roll washing member, the pencil washing member and thetwo-fluid nozzle is performed.

As the methods of supplying the washing liquid onto the surface of thesubstrate, a method of discharging a washing liquid from a single tubenozzle to land on the substrate surface, a method of spraying theatomized washing liquid from the spray nozzle to land on the substratesurface, a method of discharging the washing liquid from a porous tubenozzle (bar nozzle) to land on the substrate surface and the like areknown. The washing liquid supplied to the surface of the substratereceives the centrifugal force due to rotation of the substrate to flowtoward the outer circumference of the substrate. In addition, the flowof the washing liquid after landing on the substrate is affected notonly by the centrifugal force, but by the inertia of the flow when thereis a flow in the washing liquid in a direction parallel to the surfaceof the substrate prior to landing on the surface of the substrate, andwhen the surface of the substrate is inclined, the flow of the washingliquid is affected by gravity, and a contact angle between the washingliquid and the surface of the substrate also becomes a factor thatdetermines the flow of the washing liquid.

Regardless of the chemical liquid washing or the rinsing washing, whenthere is a location at which the flow of washing liquid is small or alocation at which the washing liquid stagnates in a part of thesubstrate, particles, such as slurry residues and metal polishing chips,still remain in the portion, and the washing becomes not sufficient.Thus, it is desirable that the washing liquid uniformly flow over theentire radius of the substrate.

With the miniaturization of the recent semiconductor devices, there havebeen increasing demands for the washing degree of the washing device.However, in the conventional washing device, the removal of the fineparticles (for example, particles of 65 nm or less) is very difficult.In particular, when the diameter of the substrate becomes 450 mm in thefuture from 300 mm which is currently the mainstream, such insufficientwashing becomes remarkable in a part of the substrate.

The problem of having difficulty in removing the fine particles will bedescribed by way of an example of the case where the horizontal flatsubstrate is rotated to perform the rinsing washing of the substratesurface. In the rinsing washing which removes the residual particles andthe residual chemical liquid, when landing the rinse liquid dischargedfrom the single tube nozzle to the vicinity of the center of thesubstrate by adopting a method of discharging the rinse liquid from thesingle tube nozzle to land on the substrate surface, although relativelyhigh washing degree can be obtained in the vicinity of the center,particles may remain outside the vicinity of the center of thesubstrate. Meanwhile, when the rinse liquid discharged from the singletube nozzle is landed on the middle of the radius of the substrate,although a relatively high washing degree can be obtained at theliquid-landing position, particles remain at locations other than thatposition. That is, when supplying the rinse liquid using the single tubenozzle, although the rinsing washing is preferably performed at theperiphery of the liquid-landing position, the rinsing effect due toliquid spread to other locations on the substrate is small.

Also, when the rinse liquid discharged from the single tube nozzle landson the substrate surface at a high angle, if the substrate surface is afragile surface such as a copper wiring or a low-k film, it is damagedby landing of the rinse liquid discharged from the single tube nozzle,thereby causing defects at the liquid-landing position (for example,near the center).

Meanwhile, in the method of spraying the atomized washing liquid from aspray nozzle above the substrate outside to land on the substratesurface, and in the method of discharging the rinse liquid from theporous tube nozzle (bar nozzle) to land on the substrate surface, due tothe discharge by the flat rotation mechanism, the removal particle orthe residual chemical liquid is discharged toward the substrate outercircumference by the centrifugal force. However, since theliquid-landing area is wide toward the outer circumference from thecenter, the landed rinse liquid in the liquid-landing area interfereswith the movement toward the outer circumference due to the centrifugalforce of the removal particles or the residual chemical liquid, andpushes them back to the inside.

Also, in the central portion, since the washing liquid quickly movestoward the outer circumference by the centrifugal force, the rinsingefficiency is lower as compared to the area in which the washing liquidspreads by rotation other than the vicinity of the center. In addition,in the area liquid-landing by the spray nozzle or the porous tubenozzle, a quantity of air with which the rinse liquid comes into contactbefore landing increases, the oxygen concentration of the rinse liquid(for example, ultrapure water) originally supplied into the CMP devicefrom the factory at the low oxygen concentration (for example, ≦10 ppb)increases (for example, 4.0 ppm=4000 ppb), thereby oxidizing the copperon the surface of the substrate.

The above-mentioned problems may similarly occur in the chemical liquidwashing, without being limited to the rinsing washing as described inthe above-described example.

It is desirable to improve a washing degree by causing a washing liquidto flow over the entire radius of the substrate in a washing devicewhich washes a substrate, while supplying the washing liquid to thesurface of the substrate such as a rotating semiconductor wafer.

A washing device of one embodiment includes: a substrate rotationmechanism which holds a substrate and rotates the substrate about acentral axis of the substrate as a rotary axis; and a first single tubenozzle which discharges a first washing liquid toward an upper surfaceof the substrate held by the substrate rotation mechanism, wherein afirst single tube nozzle discharges a first washing liquid so that thefirst washing liquid lands in front of the center of the substrate andthe landed first washing liquid flows on the upper surface of thesubstrate toward the center of the substrate, and the device has aconfiguration in which a liquid flow on the upper surface of thesubstrate after landing of the first washing liquid discharged from thefirst single tube nozzle passes through the center of the substrate.

A washing device of another aspect includes a substrate rotationmechanism which holds a substrate and rotates the substrate about acentral axis of the substrate as a rotary axis, and a spray nozzle whichsprays a second washing liquid in a fan shape toward an upper surface ofthe substrate held by the substrate rotation mechanism, wherein thedevice has a configuration in which a maximum spraying quantitydirection in which an spraying quantity is maximized in the spray nozzleis shifted close to the center of the substrate from the spray center.

A washing device of still another aspect includes a substrate rotationmechanism which holds a substrate and rotates the substrate about acentral axis of the substrate as a rotary axis; a first single tubenozzle which discharges a first washing liquid toward an upper surfaceof the substrate held by the substrate rotation mechanism; and a spraynozzle which sprays a second washing liquid toward the upper surface ofthe substrate held by the substrate rotation mechanism, wherein thedevice has a configuration in which discharging of the first washingliquid by the first single tube nozzle and spraying of the secondwashing liquid by the spray nozzle are simultaneously performed.

A washing method of one embodiment is a washing method of rotating asubstrate about a central axis of the substrate as a rotary axis anddischarging a first washing liquid toward an upper surface of thesubstrate, wherein the method has a configuration in which the firstwashing liquid lands in front of the substrate, and the liquid flow onthe upper surface of the substrate after landing passes through thecenter of the substrate.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a plan view illustrating an overall configuration of asubstrate processing apparatus equipped with a washing device in anembodiment;

FIG. 2 is a plan and front view illustrating a positional relationbetween a substrate and a single tube nozzle in a washing device of afirst embodiment;

FIG. 3 is a plan and front view illustrating a positional relationbetween a substrate and a single tube nozzle in a washing device of asecond embodiment;

FIG. 4 is a plan and front view illustrating a positional relationbetween a substrate and two single tube nozzles in a washing device of athird embodiment;

FIG. 5 is an enlarged view of a vicinity of a center of the substrate inFIG. 4;

FIG. 6 is a plan and front view illustrating a positional relationbetween a substrate and a spray nozzle in a washing device of a fourthembodiment;

FIG. 7 is a diagram illustrating a relation between a position and aflow rate of a rinse liquid which spreads in a fan shape in a spraynozzle;

FIG. 8 is a plan view illustrating a positional relation between thesubstrate and the spray nozzle in the washing device in a modifiedexample of the fourth embodiment;

FIG. 9 is a perspective view illustrating an outline of a roll washingdevice according to an embodiment;

FIG. 10 is a plan view of a washing device according to a fifthembodiment;

FIG. 11 is a plan view illustrating each area on the substrate;

FIG. 12 is a plan view of a conventional roll washing device;

FIG. 13 is a cross-sectional view taken from a line A-A′ of FIG. 12;

FIG. 14 is a partially enlarged view of FIG. 13;

FIG. 15 is a cross-sectional view taken from a line B-B′ of FIG. 12;

FIG. 16 is a plan view illustrating a washing device in a sixthembodiment;

FIG. 17 is a plan and front view illustrating a behavior of a chemicalliquid discharged from a single tube nozzle on a surface of a substratein a sixth embodiment;

FIG. 18 is a plane view of a roll washing device in a seventhembodiment;

FIG. 19 is a cross-sectional view taken from a line A-A′ of FIG. 18;

FIG. 20 is a partially enlarged view of FIG. 19;

FIG. 21 is a cross-sectional view taken from a line B-B′ of FIG. 18;

FIG. 22 is a plane view of a roll washing device in an eighthembodiment;

FIG. 23 is a cross-sectional view taken from a line A-A′ of FIG. 22;

FIG. 24 is a perspective view illustrating an outline of a pencilwashing device according to an embodiment;

FIG. 25 is a plan view of a washing device in a ninth embodiment;

FIG. 26 is a plan view of a washing device in a tenth embodiment;

FIG. 27 is a plan view of a washing device in an eleventh embodiment;

FIG. 28 is a diagram in which a longitudinal direction of an arm in thewashing device of the eleventh embodiment is viewed from the side;

FIG. 29 is a diagram illustrating a liquid-landing area of the spray bya spray nozzle in the eleventh embodiment;

FIG. 30 is a plan view of a washing device in a twelfth embodiment;

FIG. 31 is a partially enlarged view of the washing device in thetwelfth embodiment;

FIG. 32 is a diagram in which the longitudinal direction of the arm ofthe washing device in the twelfth embodiment is viewed from the side;

FIG. 33 is a plan view of the washing device in a modified example ofthe twelfth embodiment;

FIG. 34 is a plan view of a washing device in a thirteenth embodiment;

FIG. 35 is a partially enlarged view of the washing device in thethirteenth embodiment;

FIG. 36 is a diagram in which the longitudinal direction of the arm ofthe washing device in the thirteenth embodiment is viewed from the side;

FIG. 37 is a plan view of a washing device in a modified example of thethirteenth embodiment;

FIG. 38 is a plan view of a washing device in a fourteenth embodiment;

FIG. 39 is a plan view of a washing device in a modified example of thefourteenth embodiment;

FIG. 40 is a side view of a washing device in a fifteenth embodiment;and

FIG. 41 is a perspective view of a washing device of a sixteenthembodiment.

DETAILED DESCRIPTION OF NON-LIMITING EXAMPLE EMBODIMENTS

A washing device of an embodiment will be described below. Embodimentsdescribed below merely illustrate examples of a case of carrying out thepresent technique and is not intended to limit the present technique toa specific configuration which will be described below. In carrying outthe present technique, a specific configuration according to theembodiments may be appropriately employed.

A washing device of one embodiment includes: a substrate rotationmechanism which holds a substrate and rotates the substrate about acentral axis of the substrate as a rotary axis; and a first single tubenozzle which discharges a first washing liquid toward an upper surfaceof the substrate held by the substrate rotation mechanism, wherein afirst single tube nozzle discharges a first washing liquid so that thefirst washing liquid lands in front of the center of the substrate andthe landed first washing liquid flows on the upper surface of thesubstrate toward the center of the substrate, and the device has aconfiguration in which a liquid flow on the upper surface of thesubstrate after landing of the first washing liquid discharged from thefirst single tube nozzle passes through the center of the substrate.With this configuration, in the central portion of the substrate, thewashing liquid flows by the inertial force of flow of the washing liquiddischarged from the first single tube nozzle in the horizontal directionto the substrate, and the washing liquid flows toward the outercircumference of the substrate by a centrifugal force due to rotation ofthe substrate on the outer side of the central portion of the substrate.Thus, it is possible to allow the washing liquid to flow over the entireradius of the substrate.

In the above-described washing device, an incident angle of a dischargedirection of the first single tube nozzle with respect to the uppersurface of the substrate may be 45° or less. With this configuration, itis possible to sufficiently obtain the inertial force of the flow of thewashing liquid discharged from the first single tube nozzle in thehorizontal direction to the substrate.

In the above-described washing device, a distance from a liquid-landingposition of the first washing liquid to the substrate to the center ofthe substrate may be smaller than one-third of a radius of thesubstrate. With this configuration, it is possible to allow the liquidflow on the upper surface of the substrate after liquid-landing toreliably pass through the center of the substrate.

The above-described washing device may further include a spray nozzlewhich sprays a second washing liquid toward the upper surface of thesubstrate held by the substrate rotation mechanism, and the dischargingof the first washing liquid by the first single tube nozzle and thespraying of the second washing liquid by the spray nozzle may beperformed simultaneously. With this configuration, it is possible toallow the washing liquid to more reliably flow over the entire radius ofthe substrate.

In the above-described washing device, the liquid-landing position ofthe second washing liquid may be on an upstream side of a rotationaldirection of the substrate from the liquid-landing position of the firstwashing liquid. With this configuration, the liquid-landing position ofthe washing liquid by the spray nozzle is located on the downstream ofthe first washing liquid which passed through the center of thesubstrate, the first washing liquid is discharged from the outercircumference of the substrate by the centrifugal force, and at aposition at which the first washing liquid decreases, it is possible tosupply the second washing liquid by the spray nozzle.

In the above-described washing device, a maximum spraying quantitydirection in which a spraying quantity in the spray nozzle is maximizedmay be shifted closer to the center of the substrate from the spraycenter. With this configuration, it is possible to supply much moresecond washing liquid to the vicinity of the center of the substrate bythe spray nozzle.

In the above-described washing device, the spray nozzle may spray thesecond washing liquid over substantially the entire length of the radiusof the substrate, and the maximum spraying quantity direction may bedirected toward the center of the substrate or the vicinity of thecenter. With this configuration, the flow of the second washing liquidtoward the center the substrate due to spraying collides with the flowof the second washing liquid in the central portion of the substratetoward the outer circumference of the substrate due to the centrifugalforce. Thus, stagnation of the second washing liquid in the centralportion of the substrate is prevented or reduced, and the second washingliquid flows toward the outer circumference from the center of thesubstrate.

The above-described washing device may further include a second singletube nozzle which discharges a third washing liquid toward the uppersurface of the substrate held by the substrate rotation mechanism,wherein the second single tube nozzle may discharge the third washingliquid so that the third washing liquid lands beyond the center of thesubstrate and flows toward the outer circumference of the substrate fromthe liquid-landing position, a distance from the liquid-landing positionof the third washing liquid to the center of the substrate may begreater than a distance from the liquid-landing position of the firstwashing liquid to the center of the substrate, and the liquid-landingposition of the third washing liquid may be located on the downstreamside in the rotational direction of the substrate from theliquid-landing position of the first washing liquid. With thisconfiguration, it is possible to supply the third washing liquid ontothe substrate by the second single tube nozzle so as not to interferewith the flow of the first washing liquid on the surface of thesubstrate.

The above-described washing device may further include a roll washingmember which linearly extends over substantially the entire length ofthe diameter of the substrate and comes into slide-contact with theupper surface of the substrate, while rotating about a central axisparallel to the substrate, and the first single tube nozzle may land thefirst washing liquid against the roll winding side area of the rollwashing member. With this configuration, it is possible to allow thewashing liquid required for the roll washing to flow over the entireradius of the substrate.

In the above-described washing device, an angle formed between adischarge direction of the first single tube nozzle and an extensiondirection of the roll washing member may be 90°±30° in a plan view. Withthis configuration, since the first washing liquid gets into the bottomof the roll washing member to enter the roll scraping side area and issupplied to the counter washing area by the rotation of the substrate,it is possible to improve the washing properties by the washing liquidof the counter supply area.

The above-described washing device may further include a nozzle whichdirectly supplies a fourth washing liquid to the surface of the rollwashing member located on a roll scraping side area of the roll washingmember. With this configuration, since the fourth washing liquid isdirectly supplied to the roll washing member, the roll washing memberslides with the substrate in the washing area in a state of impregnatingthe fourth washing liquid, and thus, it is possible to improve washingproperties using the washing liquid.

The above-described washing device may further include a pencil washingmember which is supported on a leading end portion of the arm, rotatesabout a central axis perpendicular to the substrate, and moves towardthe outer circumference from the center of the substrate by the rotationof the arm, while coming into slide-contact with the upper surface ofthe substrate. The first single tube nozzle may land the first washingliquid on the upstream side in the rotational direction of the substratefrom the movement trajectory of the pencil washing member. With thisconfiguration, it is possible to allow the washing liquid required forthe pencil washing to flow over the entire radius of the substrate.

The above-described washing device may further include a pencil washingmember or a two-fluid jet nozzle which is supported on the leading endportion of the arm, and moves toward the outer circumference from thecenter of the substrate by the rotation of the arm, and an on-armwashing liquid supply nozzle which is provided in the arm to supply thewashing liquid to the upper surface of the substrate in the vicinity ofthe pencil washing member or the two-fluid jet nozzle. With thisconfiguration, it is possible to supply the fresh washing liquid to thewashing location.

In the above-described washing device, the on-arm washing liquid supplynozzle may be inclined to supply the washing liquid toward the washinglocation of the substrate by the pencil washing member or the two-fluidjet nozzle. With this configuration, the washing liquid flows in thedirection toward the washing location, and it is possible to supply thewashing liquid to the washing location.

In the above-described washing device, when the pencil washing member issupported on the leading end portion of the arm, the on-arm washingliquid supply nozzle may be provided on the upstream side in therotational direction of the substrate with respect to the pencil washingmember. With this configuration, the washing liquid supplied to theupper surface of the substrate is carried by the rotation of thesubstrate, and is supplied to the washing location at which thesubstrate and the pencil washing member come into slide-contact witheach other.

In the above-described washing device, when the two-fluid jet nozzle issupported at the leading end portion of the arm, the on-arm washingliquid supply nozzle may be provided on the downstream side in therotational direction of the substrate with respect to the two-fluid jetnozzle. With this configuration, since the washing liquid supplied tothe upper surface of the substrate is conveyed in a direction away fromthe washing location at which the jet flow from the two-fluid jet nozzlecollides with the upper surface of the substrate by the rotation of thesubstrate, the washing liquid does not form a thick layer at the washinglocation, and it is possible to reduce a decrease in washing force dueto the cushion effect.

In the above-described washing device, the on-arm washing liquid supplynozzle may be provided at a position closer to the center of thesubstrate than the washing location of the substrate by the pencilwashing member or the two-fluid jet nozzle. With this configuration, thewashing liquid supplied from the on-arm washing liquid supply nozzleflows toward the washing location or the vicinity of the washinglocation by the centrifugal force due to rotation of the substrate, thensmoothly flows toward the outside in the radial direction of thesubstrate, and is discharged from the outer edge of the substrate.

A washing device of another aspect of the invention includes a substraterotation mechanism which holds a substrate and rotates the substrateabout a central axis of the substrate as a rotary axis, and a spraynozzle which sprays a second washing liquid in a fan shape toward anupper surface of the substrate held by the substrate rotation mechanism,wherein the device has a configuration in which a maximum sprayingquantity direction in which an spraying quantity is maximized in thespray nozzle is shifted close to the center of the substrate from thespray center. With this configuration, it is possible to supply muchmore the second washing liquid to the vicinity of the substrate by thespray nozzle, and since the second washing liquid flows toward the outercircumference of the substrate by the centrifugal force of the substrateon the outer side of the central portion of the substrate, it ispossible to allow the second washing liquid to flow to the outercircumferential portion from the central portion of the substrate.

A washing device of still another aspect includes a substrate rotationmechanism which holds a substrate and rotates the substrate about acentral axis of the substrate as a rotary axis; a first single tubenozzle which discharges a first washing liquid toward an upper surfaceof the substrate held by the substrate rotation mechanism; and a spraynozzle which sprays a second washing liquid toward the upper surface ofthe substrate held by the substrate rotation mechanism, wherein thedevice has a configuration in which discharging of the first washingliquid by the first single tube nozzle and spraying of the secondwashing liquid by the spray nozzle are simultaneously performed. Withthis configuration, since the discharging of the washing liquid by thefirst single tube nozzle and the spraying of the washing liquid by thespray nozzle are simultaneously performed, it is possible to improve thefluidity of the washing liquid over the entire radius of the substrateand to achieve a high washing degree.

A washing method of one embodiment is a washing method of rotating asubstrate about a central axis of the substrate as a rotary axis anddischarging a first washing liquid toward an upper surface of thesubstrate, wherein the method has a configuration in which the firstwashing liquid lands in front of the substrate, and the liquid flow onthe upper surface of the substrate after landing passes through thecenter of the substrate. With this configuration, in the central portionof the substrate, the washing liquid flows by the inertial force of flowof the washing liquid discharged from the first single tube nozzle in adirection that is horizontal to the substrate, and on the outer side ofthe central portion of the substrate, the washing liquid flows towardthe outer circumference of the substrate by a centrifugal force due torotation of the substrate. Accordingly, it is possible to allow thewashing liquid to flow over the entire radius of the substrate.

FIG. 1 is a plan view illustrating an overall configuration of asubstrate processing apparatus equipped with a washing device accordingto an embodiment. As illustrated in FIG. 1, the substrate processingapparatus includes an approximately spherical housing 10, and a loadport 12 on which a substrate cassette configured to stock a substrate,such as a large number of semiconductor wafers, is mounted. The loadport 12 is disposed adjacent to the housing 10. An open cassette, astandard manufacturing interface (SMIF) pod or a front opening unifiedpod (FOUP) can be mounted on the load port 12. The SMIF pod and the FOUPare air-tight containers that can maintain an environment isolated froman external space by storing the substrate cassette inside thereof andcovering it with a partition.

A plurality of (four in this example) polishing units 14 a to 14 d, afirst washing unit 16 and a second washing unit 18 which wash thepolished substrate, and a drying unit 20 which dries the washedsubstrate are housed inside the housing 10. The polishing units 14 a to14 d are arranged along a longitudinal direction of the substrateprocessing apparatus, and the washing units 16 and 18 and the dryingunit 20 are also arranged along the longitudinal direction of thesubstrate processing apparatus.

A first conveying robot 22 is disposed in a region, which is surroundedby the load port 12, and the polishing unit 14 a and the drying unit 20located on the load port 12 side, and a conveying unit 24 is disposedparallel to the polishing units 14 a to 14 d. The first conveying robot22 receives the substrate before polishing from the load port 12 anddelivers the substrate to the conveying unit 24, and at the same time,conveys the substrate received from the drying unit 20 after drying anddelivers the substrate between the polishing units 14 a to 14 d.

A second conveying robot 26 configured to deliver the substrate betweenfirst washing unit 16 and the second washing unit 18 is disposed betweenthe units 16 and 18, and a third conveying unit 28 configured to deliverthe substrate between second washing unit 18 and the drying unit 20 isdisposed between the units 18 and 20. Furthermore, a control unit 30 isdisposed inside the housing 10 to control the movement of each device ofthe substrate processing apparatus.

In this example, as the first washing unit 16, a roll washing device isused which brings the roll washing member linearly extending oversubstantially the entire length of the diameter of the substrate intocontact with the substrate in the presence of the washing liquid, andscrubs and washes the substrate surface while rotating about the centralaxis parallel to the substrate. As the second washing unit 18, a pencilwashing device is used which brings a lower end contact surface of acylindrical pencil washing member extending in the vertical directioninto contact with the substrate in the presence of the washing liquid,and moves the pencil washing member in one direction while rotating,thereby scrubbing and washing the substrate surface. Also, as the dryingunit 20, a spin drying unit is used which ejects an IPA vapor from amoving spray nozzle toward the horizontally rotating substrate to drythe substrate, and rotates the substrate at a high speed to dry thesubstrate by the centrifugal force.

In addition, in this example, although the roll washing device is usedas the first washing unit 16, as the first washing unit 16, the samepencil washing device as the second washing unit 18 may be used, or atwo-fluid jet washing device which washes the substrate surface by thetwo-fluid jet may be used. In this example, although the pencil washingdevice is used as the second washing unit 18, the same roll washingdevice as the first washing unit 16 may be used as the second washingunit 18, or a two-fluid jet washing device which washes the substratesurface by the two-fluid jet may be used. The washing device of theembodiment is also applicable to both the first washing unit 16 and thesecond washing unit 18, and is also applicable to the roll washingdevice, the pencil washing device, and the two-fluid jet washing device.

Hereinafter, specific application examples will be described as theembodiment of the washing device. First, as the first to fourthembodiments, the application of the present technique in the rinsingwashing of the first washing unit 16 or the second washing unit 18 willbe described. At the time of rinsing washing, since the roll washingmember of the first washing unit 16 and the pencil washing member of thesecond washing unit do not act, they are completely removed from theupper part of the substrate. This is because the situation is preventedin which particles and the chemical liquid adhering to a member such asthe roll washing member and the pencil washing member may fall onto thesubstrate during rinsing washing to contaminate the substrate.

A substrate W is held by a substrate rotation mechanism (notillustrated) so that the surface faces upward. When the substraterotation mechanism rotates while holding the substrate W, the substrateW rotates about its central axis (axis perpendicular to the surface ofthe substrate W through a center O) as a rotary axis.

First Embodiment

FIG. 2 view (a) is a plan view illustrating the positional relationbetween the substrate and the single tube nozzle in the washing deviceof the first embodiment, and FIG. 2 view (b) is a front view of FIG. 2view (a). FIG. 2 illustrates a washing liquid supply to the flatsubstrate surface by the single tube nozzle. A single tube nozzle 41 asthe washing liquid supply nozzle discharges a rinse liquid L toward asurface (upper surface) of a substrate W from the outside of the upperspace of the substrate W, that is, above the substrate W. That is, thesingle tube nozzle 41 supplies the rinse liquid L to the surface of thesubstrate W obliquely from the upper part. The rinse liquid L may beultrapure water (DIW) and may be functional water such as hydrogenwater.

A position, a discharge direction, a bore diameter and a flow speed ofthe single tube nozzle 41 are designed so that the rinse liquid Ldischarged from the single tube nozzle 41 satisfies the followingconditions. First, as illustrated in FIG. 2 view (a), a liquid-landingposition A of the rinse liquid discharged from the single tube nozzle 41to the surface of the substrate W becomes a position away from thecenter O of the substrate W by a distance Ra rather than the center O ofthe substrate W. An orientation of the single tube nozzle 41 isdetermined so that the center O of the substrate W is present on a lineconnecting the single tube nozzle 41 with the liquid-landing position Ain a plan view. That is, the single tube nozzle 41 discharges the rinseliquid L toward the center O of the substrate W in a plan view, but theliquid-landing position A is located at a front position from the centerO of the substrate W by a distance Ra.

As illustrated in FIG. 2 view (b), in the front view, an angle α(incident angle) between a liquid flow La until discharging from thesingle tube nozzle 41 and landing on the surface of the substrate W andthe surface of the substrate W is set to approximately 30°. The incidentangle α is not limited to 30°, but is preferably 45° or less. In thisway, since the single tube nozzle 41 supplies the rinse liquid to thesurface of the substrate W obliquely from the upper part, the liquidflow La of the rinse liquid L flows along a planar direction of thesubstrate W, and specifically, flows in a direction toward the center Oof the substrate W to land on the surface of the substrate W. Then, therinse liquid L also flows in the direction toward the center O of thesubstrate W after landing, by the inertia of the flow of the liquid flowLa in the direction toward the center O of the substrate W.

Since the substrate W rotates as described above, the rinse liquid Llanding on the surface of the substrate W is subjected to a centrifugalforce due to the rotation to flow toward the outside of the substrate W.However, as illustrated in FIG. 2, in this embodiment, since the liquidflow lands in the vicinity of the center O of the substrate W, the largecentrifugal force does not act at a position close to the center O.Further, since there is already a flow directed toward the center Obefore landing, by the inertia, the rinse liquid L forms a liquid bundle(liquid line) Lb which linearly advances in the direction that matchesthe supply direction of the single tube nozzle 41 in a plan view, andflows through the surface of the substrate W. As a result, the rinseliquid L landing on the surface of the substrate W passes through thecenter O of the substrate W. When the rinse liquid L passes through thecenter O of the substrate W, since the inertial force of the single tubenozzle 41 in the supply direction is gradually weakened and thecentrifugal force increases toward the outer circumference, the rinseliquid becomes a liquid flow Lc flowing toward the outer circumferencewhile drawing a curve in the rotational direction of the substrate sothat the width gradually widens toward the outer circumference, andfinally it is discharged from the outer circumference of the substrateW.

The behavior of the rinse liquid L on the surface of the substrate W asdescribed above depends on the surface characteristics (hydrophilicityand hydrophobicity) and the rotational speed (magnitude of thecentrifugal force) of the substrate W, in addition to the position ofthe single tube nozzle 41, the discharge direction, the bore diameter,the flow speed (bore diameter×flow speed is flow rate), and theliquid-landing position. As the liquid-landing position is away from thecenter O of the substrate W, it is desirable that the ingredients of theliquid flow La parallel to the surface of the substrate W be great, andfor this reason, it is desirable to reduce the incident angle α. Also,when the rotational speed of the substrate W is too fast, since theinertial force loses to the centrifugal force in the liquid flow Lb andthe liquid flow Lb does not pass through the center O of the substrate,it is not desirable to excessively rotate the substrate W at a highspeed, and it is desirable to set the rotational speed to 1500 rpm, andmore desirably, to 1000 rpm or less.

Also, when the surface of the substrate W is hydrophobic, it isdesirable to get the liquid-landing position close to the center O(reduce Ra) to reduce the incident angle. Hydrophilicity of the surfaceof the substrate W is set so that the contact angle becomes 0 to 70°.Also, when the diameter of the single tube nozzle 41 is 1 to 5 mm, theflow rate is set to 500 to 2000 ml/min, and when the bore diameter ofthe single tube nozzle 41 is 5 to 10 mm, the flow rate is set to 2000ml/min or more. Further, if the distance Ra from the center O of thesubstrate W to the liquid-landing position A is too large, since it isnecessary to increase the flow speed so that the liquid flow afterlanding passes through the center O of the substrate W by the inertialforce as described above, it is desirable to set the distance to onethird or less of the radius R.

As described above, according to the washing device of this embodiment,although the rinse liquid L is supplied onto the surface of thesubstrate W from the single tube nozzle 41, the rinse liquid is notdischarged to the center O of the substrate W from the upper part of thesubstrate W at a large incident angle (for example, 90°), the rinseliquid is discharged so as to land on the front of the center O towardthe direction of the center O in a plan view from the obliquely upwarddirection at a relatively low incident angle, and the landed rinseliquid L flows to pass through the center O of the substrate W.Accordingly, the rapid liquid substitution is performed even at thecenter O of the substrate W having the small centrifugal force, and therinse liquid L is prevented from stagnating in the central portion ofthe substrate W. Further, even when the surface of the substrate W is alayer of a soft material such as copper, it is possible to reduce thedamage to the surface as compared to the case where the incident angleis large.

Second Embodiment

FIG. 3 view (a) is a plan view illustrating the positional relationbetween the substrate and the single tube nozzle and the spray nozzle inthe washing device of the second embodiment, and FIG. 3 view (b) is afront view of FIG. 3 view (a). FIG. 3 illustrates the washing liquidsupply to the flat substrate surface by the single tube nozzle and thespray nozzle. The single tube nozzle 41 as the washing liquid supplynozzle is configured similarly to the first embodiment. In thisembodiment, a spray nozzle 42 as a washing liquid supply nozzle is alsoadded to the first embodiment. The discharging of the rinse liquid L1 bythe single tube nozzle 41 and the spraying of the rinse liquid L2 by thespray nozzle 42 are simultaneously performed.

As illustrated in FIG. 3 view (b), the spray nozzle 42 sprays the rinseliquid L2 toward the surface (upper surface) of the substrate W from theoutside of the upper space of the substrate W above the substrate W.That is, the spray nozzle 42 supplies the rinse liquid L2 to the surfaceof the substrate W obliquely from the upper part. Accordingly, the rinseliquid La2 sprayed from the spray nozzle 42 is sprayed to spread in aconical shape having a peak on the spray nozzle 42, and lands on thesurface of the substrate W at an oval liquid-landing area Lb2.

The liquid-landing area Lb2 spreads from the outer circumference to thecenter O of the substrate W, and is located on the upstream side in therotational direction of the substrate W from the liquid-landing positionof the rinse liquid L1 discharged from the single tube nozzle 41. Inaddition, in this case, the upstream side/downstream side of thesubstrate W in the rotational direction on the basis of a certainreference position refer to positions up to the 180° rotation in thereverse direction/forward direction of the rotational direction of thesubstrate W from the reference position, and in the case of the exampleof FIG. 3, since the liquid-landing position of the rinse liquid L1 as areference position is located on the right side of the center O of thesubstrate W, an upper half of the substrate W of FIG. 3 view (a) is anupstream side as viewed from the liquid-landing position of the rinseliquid L1 as the reference position, and a lower half of the substrate Wof FIG. 3 view (a) is a downstream side as viewed from theliquid-landing position of the rinse liquid L1 as the referenceposition.

As illustrated in FIG. 3 view (a), a spray direction (direction of acenter line of the conical rinse liquid La2 sprayed from the spraynozzle 42 prior to landing on the substrate W) 121 of the spray nozzle42 is generally directed to the center O of the substrate W in a planview. As illustrated in FIG. 3 view (b), an angle (incident angle) βformed between the spray direction 121 and the surface of the substrateW in a front view is greater than the incident angle α of the singletube nozzle 41 and is approximately 45°. Since the sprayed particles ofthe rinse liquid La2 are very small and light, when the incident angleto the surface of the substrate W rotating at a high speed is low, therinse liquid La2 is repelled on the surface of the substrate W or in thevicinity of the surface, and the liquid-landing rate is lowered and thesupply efficiency decreases. Accordingly, the spray direction 121 isdesirably large and may be 90°.

As in this embodiment, it is experimentally clear that, in the rinsingwashing of the washing device, when the supply of the rinse liquid L1 bythe single tube nozzle 41 and the supply of the rinse liquid L2 by thespray nozzle 42 are simultaneously performed, the washing degree isimproved. That is, the washing degree is improved, by promoting the flowof the rinse liquid even in both the central portion and the peripheralportion of the surface of the substrate W, by the action of the rinseliquid L1 by the single tube nozzle 41 described in the first embodimentin the central portion of the substrate W, and by the action of therinse liquid L2 by the spray nozzle 42 in the outer circumferentialportion from the central portion of the substrate W. Thus, theliquid-landing area La2 of the spray nozzle 42 does not need tonecessarily reach the center O of the substrate W. In addition, thespray nozzle 42 may spray the rinse liquid in a fan shape, without beinglimited to spraying of the rinse liquid in a conical shape.

Third Embodiment

FIG. 4 view (a) is a plan view illustrating the positional relationbetween the substrate and the two single tube nozzles in a washingdevice of a third embodiment, and FIG. 4 view (b) is a front view ofFIG. 4 view (a). FIG. 4 illustrates a washing liquid supply to the flatsubstrate surface by the two single tube nozzles. The first single tubenozzle 41 is configured similarly to the first embodiment. In thepresent embodiment, a second single tube nozzle 43 is further added tothe first embodiment. The discharging of the rinse liquid L1 by thesingle tube nozzle 41 and the discharging of the rinse liquid L3 by thesingle tube nozzle 43 are simultaneously performed. As illustrated inFIG. 4B, the single tube nozzle 43 discharges the rinse liquid L3 towardthe surface (upper surface) of the substrate W from the outside of theupper space of the substrate W above the substrate W. That is, thesingle tube nozzle 43 supplies the rinse liquid L3 to the surface of thesubstrate W obliquely from the upper part.

A position, a discharge direction, a bore diameter and a flow speed ofthe single tube nozzle 43 are designed so that the rinse liquid L3discharged from the single tube nozzle 43 satisfies the followingconditions. As illustrated in FIG. 4 view (a), the single tube nozzle 43is provided on the opposite side of the center of the substrate W withrespect to the single tube nozzle 41 in a plan view. A liquid-landingposition B of the rinse liquid discharged from the single tube nozzle 43to the surface of the substrate W is set on the downstream side of theliquid-landing position A of the single tube nozzle 41. Thus, asillustrated in FIG. 4 view (a), the rinse liquid L3 discharged from thesingle tube nozzle 43 lands on the surface of the substrate W, and then,flows on surface of the substrate W to spread toward the outercircumference as the liquid flow Lb3 on the downstream side of theliquid-landing position A, without being mixed with the rinse liquid L1of the single tube nozzle 41.

FIG. 5 is an enlarged view of the vicinity of the center O of thesubstrate W in FIG. 4 view (a). As illustrated in FIGS. 4 view (a) and5, the liquid-landing position B is at a position beyond the center O ofthe substrate W when viewed from the single tube nozzle 43, and becomesa position away from the center O of the substrate W by a distance Rb.The distance Rb of (the center of) the liquid-landing position B fromthe center O of the substrate W is set longer than the distance Ra of(the center of) the liquid-landing position A from the center O of thesubstrate W. However, when the distance Rb is long, since the rangecapable of being washed by the rinse liquid L3 from the single tubenozzle 43 is narrowed, the distance Rb is smaller than one quarter ofthe radius R of the substrate W.

In addition, it is not necessary that the rinse liquid L3 dischargedfrom the single tube nozzle 43 linearly flows on the surface of thesubstrate W after landing. Thus, conditions such as the bore diameterand the flow speed of the rinse liquid L3 discharged from the singletube nozzle 43 may be set so that the rinse liquid L3 flows toward theouter circumference by the centrifugal force just after landing.However, from the viewpoint that when the incident angle is large, thesurface of the substrate W is damaged, since it is the same as the caseof the single tube nozzle 41, it is also desirable that the incidentangle of the single tube nozzle 43 be small. In the example of FIG. 4,the incident angle of the single tube nozzle 43 is also approximately30° in the same manner as the single tube nozzle 41.

As in this embodiment, it is experimentally clear that, when the supplyof the rinse liquids L1 and L3 is simultaneously performed by the twosingle tube nozzle 41 and single tube nozzle 43 in the rinsing washingof the washing device, the washing degree is improved. That is, thewashing degree is improved, by promoting the flow of the rinse liquideven in both the central portion and the peripheral portion of thesurface of the substrate W, by the action of the rinse liquid L1 by thesingle tube nozzle 41 described in the first embodiment in the centralportion of the substrate W, and by the action of the rinse liquid L3 bythe single tube nozzle 43 in the peripheral portion from the centralportion of the substrate W.

Fourth Embodiment

FIG. 6 view (a) is a plan view illustrating a positional relationbetween the substrate and the spray nozzle in a washing device of afourth embodiment, and FIG. 6 view (b) is a front view of FIG. 6 view(a). FIG. 6 illustrates the washing liquid supply to the flat substratesurface by the spray nozzle. As illustrated in FIG. 6, the spray nozzles44 sprays the rinse liquid L4 toward the surface (upper surface) of thesubstrate W from the outside of the upper space of the substrate W abovethe substrate W. That is, the spray nozzle 44 supplies the rinse liquidL4 to the surface of the substrate W obliquely from the upper part.While the rinse liquid La4 is sprayed from the spray nozzle 44 of thepresent embodiment to spread in a fan shape, the spray nozzle 44 is anasymmetric fan-shaped spray nozzle in which a direction, in which theflow rate (spraying quantity) in the sprayed rinse liquid La4 ismaximized, is shifted from the center of the sprayed rinse liquid La4.

FIG. 7 is a diagram illustrating a relation between the position and theflow rate of the rinse liquid La4 which spreads in a fan shape in thespray nozzle 44. The normal spray nozzle 44 has a symmetricaldistribution in which the flow rate at the center position of the rinseliquid spreading in a fan shape is greatest, and the flow rate decreasesas it goes to both edges. However, as illustrated in FIG. 7, the rinseliquid L4 sprayed from the spray nozzle 44 of this embodiment has anunequal fan distribution in which the flow rate is maximized at the edgeof the rinse liquid La4 spreading in a fan shape, and the flow ratedecreases as it goes to the edge of the opposite side.

In this embodiment, the position and the angle of the spray nozzle 44are set so that the direction (maximum spraying quantity direction) 141of the maximum flow rate is near a direction toward the center O of thesubstrate W in a plan view, and the liquid-landing area Lb4 reaches theouter circumference from the center of the substrate W. Specifically,the maximum spraying quantity direction 141 is directed to the center Oof the substrate W in a plan view. Further, as illustrated in FIG. 6view (a), the center O of the substrate W is included in theliquid-landing area Lb4. As a result, in the liquid-landing area Lb4,the flow rate (liquid-landing quantity) is greatest at the center O ofthe substrate W, and as it goes to the edge of the substrate W, the flowrate (liquid-landing quantity) decreases. In addition, in FIG. 6, therinse liquid L4 after landing on the surface of the substrate W is notillustrated.

If the maximum spraying quantity direction 141 is directed to the centerO of the substrate W in a plan view but the liquid-landing area Lb4 istoo far away from the center O of the substrate W, as described in thebackground art, the rinse liquid L4 trying to flow toward the center Oof the substrate W by the inertial force after landing collides with therinse liquid L4 trying to flow to the outer circumference by thecentrifugal force from the vicinity of the center O of the substrate W,and the fluidity of the rinse liquid L4 is lowered at this portion. Incontrast, the spray nozzle 44 of this embodiment sprays the rinse liquidso that the maximum spraying quantity direction 141 is not only directedto the center O of the substrate W in a plan view, but as describedabove, with respect to the surface of the substrate W obliquely from theupper part, the center O of the substrate W is included in theliquid-landing area Lb4. Thus, the rinse liquid L4 landing near thecenter O of the substrate W flows in a direction away from the center Oby the inertial force as it is, and flows toward the outer circumferenceby the centrifugal force after being away from the center O.Accordingly, the collision of the rinse liquid L4 as described abovedoes not occur, and the fluidity is not also lowered.

FIG. 8 is a plan view illustrating a positional relation between thesubstrate and the spray nozzle in a washing device in a modified exampleof the fourth embodiment. In this example, two asymmetric fan-shapedspray nozzles are provided as described above. That is, the washingdevice is provided with a spray nozzle 45 of the same configuration inaddition to the spray nozzle 44, and the two spray nozzles 44 and 15 aresimultaneously used. The two spray nozzles 44 and 15 are set so that themaximum spraying quantity directions 141 and 151 are about 90° in a planview. Even in this modified example, each of the spray nozzles 44 and 15may act similarly to the spray nozzle 44 of FIG. 6 to be able to achievethe same effect as described above. Further, the angle between themaximum spraying quantity directions 141 and 151 of the spray nozzles 44and 15 is not limited to 90°.

In addition, in the first to fourth embodiments, the embodiments havebeen described as an example of the case of supplying the rinse liquidin the rinsing washing. However, in the first embodiment, the secondembodiment, the fourth embodiment and its modified example, it is alsopossible to apply the supply of the washing liquid to the chemicalliquid washing such as the roll washing or the pencil washing. That is,even when at least the chemical liquid is supplied to the substrate(rinse liquid may also be simultaneously supplied), and at the sametime, the substrate is scrubbed and washed using a roll washing memberand a pencil washing member, the chemical liquid (and rinse liquid) mayalso be supplied as described in the first embodiment, the secondembodiment, the fourth embodiment and its modified example.

Hereinafter, as fifth to seventh embodiments, an example of applying thepresent technique to the roll washing device will be described, butprior to the description of each embodiment, a general configuration ofthe roll washing device will be described.

FIG. 9 is a perspective view illustrating an outline of the roll washingdevice according to an embodiment. As illustrated in FIG. 9, the rollwashing device 50 includes, as a substrate rotation mechanism, aplurality of (four in FIG. 9) horizontally movable spindles 51 whichsupports the circumferential portion of the substrate W with the surfacefacing upward and horizontally rotates the substrate W, an upper rollwashing member (roll sponge) 52 which is rotatably supported on a rollholder (not illustrated), and a lower roll washing member (roll sponge)53 which is rotatably supported on a roll holder (not illustrated). Theupper roll washing member 52 and the lower roll washing member 53 have acylindrical shape, extend in an elongated shape, and are made up of, forexample, a PVA. In addition, the upper roll washing member 52 is freelymovable up and down with respect to the surface of the substrate W bythe roll holder, and the lower roll washing member 53 is freely movableup and down with respect to the back surface of the substrate W by theroll holder.

The upper roll washing member 52 rotates by a drive mechanism (notillustrated) as indicated by an arrow F1, and the lower roll washingmember 53 rotates by a drive mechanism (not illustrated) as indicated byan arrow F2. Two washing liquid supply nozzles 54 and 55 are disposedwhich are located above the substrate W rotated by being supported bythe spindle 51 to supply a washing liquid onto the surface of thesubstrate W. The washing liquid supply nozzle 54 is a nozzle whichsupplies the rinse liquid (for example, ultrapure water) to the surfaceof the substrate W, and the washing liquid supply nozzle 55 is a nozzlewhich supplies a chemical liquid to the surface of the substrate W.

The roll washing device 50 horizontally rotates the substrate W, bypositioning the peripheral portion of the substrate W within a fittinggroove formed on an outer circumferential side surface of a frame 51 aprovided on the upper part of the spindle 51, and by rotating (turning)the frame 51 a while being pressed inward. In this example, two frames51 a of the four frames 51 a give a rotational force to the substrate W,and other two frames 51 a have the function of bearing which receivesthe rotation of the substrate W. In addition, a rotational force may begiven to the substrate W by connecting all the frames 51 a to the drivemechanism.

In a state where the substrate W is horizontally rotated in this way,while supplying the rinse liquid to the surface of the substrate W fromthe washing liquid supply nozzle 54, and supplying a chemical liquid tothe surface of the substrate W from the washing liquid supply nozzle 55,the upper roll washing member 52 is lowered while being rotated to comeinto contact with the surface of the rotating substrate W. As a result,in the presence of the washing liquid (rinse liquid and chemicalliquid), the surface of the substrate W is scrubbed and washed by theupper roll washing member 52. The length of the upper roll washingmember 52 is set to be slightly longer than the diameter of thesubstrate W. Moreover, the upper roll washing member 52 is disposed sothat its central axis (rotary axis) O_(R) is substantially orthogonal tothe central axis (the rotary center) O_(W) of the substrate W and so asto extend over the entire length of the diameter of the substrate W.Thus, the entire surface of the substrate W is simultaneously washed.

Hereinafter, the fifth to seventh embodiments will be described, butthese embodiments are different from one another in the configuration ofthe washing liquid supply nozzle.

Fifth Embodiment

FIG. 10 is a plan view of a washing device according to a fifthembodiment. In FIG. 10, the spindle is not illustrated. The washingdevice includes a single tube nozzle 61 which discharges the rinseliquid as the washing liquid, and a single tube nozzle 63 whichdischarges the chemical liquid as the washing liquid. The single tubenozzles 61 and 63 discharge the washing liquid toward the surface (theupper face) of the substrate W from the outside of the upper space ofthe substrate W above the substrate W. That is, the single tube nozzles61 and 63 supply the washing liquid to the surface of the substrate Wobliquely from the upper part. The rinse liquid may be ultrapure water(DIW) and may be functional water such as hydrogen water. Solution(acidic chemical liquid or weak alkaline chemical liquid) other thanelectrolytic liquid (liquid in the vicinity of pH 7) is used as thechemical liquid. For example, organic acids such as citric acid oroxalic acid are used as the acidic chemical liquid, and for example,organic alkali is used as the weak alkaline chemical liquid.

The positions, the discharge directions, the bore diameters and the flowspeed of the single tube nozzles 61 and 63 are set under the sameconditions as described for the single tube nozzle 41 in the firstembodiment, respectively. In addition, the washing liquid is dischargedfrom the single tube nozzles 61 and 63 so as to land in front of thewashing area (scrubbing area) 521 in which the upper roll washing member52 and the substrate W are in contact with each other. Both the singletube nozzles 61 and 63 supply the washing liquid to a roll winding sidearea (right half area of the substrate W illustrated in FIG. 10) of thesubstrate W which will be described below. An angle γ between thedischarge directions 611 and 631 of the single tube nozzles 61 and 63 isapproximately 90° in a plan view, but the angle γ is not limited to 90°.

The washing device is further provided with a spray nozzle 62 whichsprays a rinse liquid as a washing liquid, and a spray nozzle 64 whichsprays a chemical liquid as a washing liquid. The spray nozzles 62 and64 also supply the washing liquid to roll winding side area of thesubstrate W. Although the spray nozzles 62 and 64 are approximately atthe same positions as the single tube nozzles 61 and 63 in a plan viewrespectively, in a manner similar to that illustrated in FIG. 3( b), theincident angle of the spray nozzles 62 and 64 is greater than theincident angle of the single tube nozzles 61 and 63, and the spraynozzles 62 and 64 spray the washing liquid from the further upper part.

Both the spray nozzles 62 and 64 are asymmetric fan-shaped spray nozzlesas described in the fourth embodiment, and the positions, the injectiondirections thereof or the like are the same as those of the spraynozzles 44 and 45 described in the modified example (FIG. 8) of thefourth embodiment. That is, the maximum spraying quantity directions 621and 641 are directed to the center O of the substrate W in a plan view.The angle between the maximum spraying quantity directions 621 and 641is also, but not limited to, approximately 90°. The liquid-landing areasof the spray nozzles 62 and 64 extend from the washing area 521 near thecenter O of the substrate W to the outer circumference of the substrateW.

The single tube nozzle 61 and the spray nozzle 62, which supply therinse liquid, supply the washing liquid to the upstream side in therotational direction of the substrate W than the single tube nozzle 63and the spray nozzle 64 which supply a chemical liquid. By supplyingboth the rinse liquid and the chemical liquid to the roll winding sidearea of the substrate W, on the surface of the substrate W which movesto the lower half area of the washing area 521, there is a state inwhich the chemical liquid and the rinse liquid are mixed with eachother.

Sixth Embodiment

Prior to the description of the sixth embodiment, the conventionalproblems solved by a washing device of a sixth embodiment will bedescribed. FIG. 11 is a plan view illustrating each area on thesubstrate. As illustrated in FIG. 11, through the rotary center O_(W) ofthe substrate W, a straight line orthogonal to the rotary axis O_(R) ofthe upper roll washing member 52 is set to an X-axis, and a straightline along the rotary axis O_(R) of the upper roll washing member 52 isset to a Y-axis. The upper roll washing member 52 rotates (turns) in aclockwise direction in a front view, and the substrate W rotates in aclockwise direction in a plan view.

The surface of the substrate W is divided into two areas R_(I) and R_(O)on the left and right sides across the upper roll washing member 52,that is, across the Y-axis. In FIG. 11 in which the upper roll washingmember 52 rotates in the clockwise direction, a right one side area isdefined as a roll winding side area R_(I), and a left one side area isdefined as a roll scraping side area R_(O). That is, the roll windingside area R_(I) is a one side area (right side in FIG. 11) in which thewashing liquid is caught by the rotation of the upper roll washingmember 52, and the roll scraping side area R_(O) is a one side area(left side in FIG. 11) in which the washing liquid is scraped out by therotation of the upper roll washing member 52.

Furthermore, each of the roll winding side area R_(I) and the rollscraping side area R_(O) is divided into an upstream area W_(U) and adownstream area W_(D) with respect to the rotational direction of thesubstrate W by the X-axis as a boundary. In the roll winding side areaR_(I), the upstream area W_(I) above the X-axis is defined as a rollwinding upstream area R_(I)−W_(U), and the downstream area W_(D) belowthe X-axis is defined as a roll winding downstream area R_(I)−W_(D).Similarly, in the roll scraping side area R_(O), the upstream area W_(U)below the X-axis is defined as a roll scraping upstream areaR_(O)−W_(U), and the downstream area W_(D) above the X-axis is definedas a roll scraping downstream area R_(O)−W_(D).

FIG. 12 is a plan view of a conventional roll washing device, FIG. 13 isa cross-sectional view taken from a line A-A′ of FIG. 12, FIG. 14 is apartially enlarged view of FIG. 13, and FIG. 15 is a cross-sectionalview taken from a line B-B′ of FIG. 12. In FIGS. 13 and 14, the spraynozzles 71 and 74 are not illustrated. As illustrated in FIG. 12, theroll washing device includes four spray nozzles 71 to 74. All the spraynozzles 71 to 74 are nozzles which spray a washing liquid in a conicalshape.

Also, all the spray nozzles 71 to 74 supply the washing liquid to theroll winding side area of the substrate W. The spray nozzles 71 and 74spray the rinse liquid as the washing liquid, the spray nozzles 72 and73 spray the chemical liquid as the washing liquid. The liquid-landingareas of the rinse liquid sprayed from the spray nozzles 71 and 74 reachthe upper roll washing member 52, and a part of the rinse liquid isdirectly sprayed to the upper roll washing member 52.

As illustrated in FIGS. 12 and 13, in the counter washing area 521 c,since the movement directions of the upper roll washing member 52 andthe substrate W are opposite to each other, the relative movement speed(sliding movement speed) of both increases. Therefore, the physicalwashing characteristics of the counter washing area 521 c are enhanced.

Meanwhile, the chemical liquid of the roll scraping downstream areaR_(O)−W_(D) as a non-liquid supply side area is a chemical liquid whichis used for scrubbing and washing using the upper roll washing member 52in a lower forward washing area 521 f of the washing area 521 beforehalf-rotation, and since most of the chemical liquid used for scrubbingand washing using the upper roll washing member 52 in the forwardwashing area 521 f is discharged to the outer circumference of thesubstrate W, the chemical liquid is very small in the counter washingarea 521 c. In addition, in the roll winding upstream area R_(I)−W_(U)as a liquid supply side area, the washing liquid supplied to thevicinity of the counter washing area 521 c is conveyed in a direction inwhich the counter washing area 521 c moves away by the rotation of thesubstrate W and is not supplied to the counter washing area 521 c.

In addition, although a plurality of small protrusions is formed on thesurface of the upper roll washing member 52 (in FIG. 14, only threeprotrusions 522 a to 522 c are illustrated), as described above, aprotrusion 522 a of the roll winding side area R_(I) side of the upperroll washing member 52 is directly supplied with the rinse liquid and isimmersed with the rinse liquid, or is supplied with the rinse liquidfrom the inside of the upper roll washing member 52 and is immersed withthe rinse liquid. When the protrusion 522 a immersed with the rinseliquid reaches the counter washing area 521 c by the rotation of theupper roll washing member 52, similarly to the protrusion 522 b, theprotrusion 522 a is crushed by the substrate W, and the immersed rinseliquid leaks to the roll winding side area R_(I) and the roll scrapingside area R_(O).

Then, a small quantity of washing liquid, which is conveyed by therotation of the substrate W from the roll scraping downstream areaR_(O)−W_(D) and tries to get into the counter washing area 521 c, isalso pushed out by the leaked rinse liquid and is less likely to besupplied to the counter washing area 521 c. Therefore, a sufficientquantity of fresh washing liquid is not supplied to the counter washingarea 521 c, and the chemical liquid washing characteristics are lowered.

Meanwhile, as illustrated in FIG. 15, in the forward washing area 521 f,since the movement directions of the upper roll washing member 52 andthe substrate W are the forward direction, the relative movement speed(sliding movement speed) of both decreases. Therefore, the physicalwashing characteristics of the forward washing area 521 f are lowered.Meanwhile, in the roll winding downstream area R_(I)−W_(D) as the liquidsupply side area, the fresh washing liquid is sufficiently supplied tothe vicinity of the forward washing area 521 f by the spray nozzle 73,and the washing liquid supplied to the vicinity of the forward washingarea 521 f is supplied to the forward washing area 521 f by rotation ofthe substrate W. Therefore, the chemical liquid washing characteristicsof the forward washing area 521 f are enhanced.

As described above, in the conventional roll washing device, the counterwashing area 521 c have the high physical washing characteristics andthe low chemical liquid washing characteristics, and the forward washingarea 521 f has the high chemical liquid washing characteristics and thelow physical washing characteristics. Therefore, the present embodimentis intended to improve the chemical liquid washing characteristics ofthe counter washing area 521 c.

FIG. 16 is a plan view illustrating a washing device in the sixthembodiment. In this embodiment, only an arrangement of a single tubenozzle 63 is different from the fifth embodiment, and otherconfigurations are the same as those of the fifth embodiment. The singletube nozzle 63 for discharging the chemical liquid supplies the chemicalliquid to the roll winding side area of the substrate W similarly to thefifth embodiment, but an angle formed between the discharge direction631 of the single tube nozzle 63 and the extension direction (the rotaryaxis) of the upper roll washing member 52 is 90° in a plan view. Theangle is not limited to 90°, and is preferably in the range of 90°±30°.That is, in this embodiment, the discharge direction of the single tubenozzle 63 for discharging the chemical liquid and the maximum sprayingquantity direction 641 of the spray nozzle 64 for spraying the chemicalliquid are not substantially in the same direction in a plan view.

FIG. 17 view (a) is a plan view illustrating a behavior of the chemicalliquid discharged from the single tube nozzle 63 on the surface of thesubstrate W in the present embodiment, and FIG. 17 view (b) is a frontview of FIG. 17 view (a). As illustrated in FIG. 17, the roll windingside area R_(I) of the substrate W is a liquid supply side area to whichthe washing liquid is supplied by the single tube nozzles 61 and 63, andthe spray nozzles 62 and 64, and the roll scraping side area R_(O) ofthe substrate W is a non-liquid supply side area to which the washingliquid is not supplied.

The single tube nozzle 63 supplies the chemical liquid so as to landwith respect to the surface of the substrate W in the vicinity of thecenter O of the substrate W at a relatively low incident angle. Sincethe chemical liquid-landing on the surface of the substrate W has a flowto a direction parallel to the surface of the substrate W, and thecentrifugal force is also weak in the vicinity of the center O of thesubstrate W, the chemical liquid passes through the bottom of the upperroll washing member 52 and enters the non-liquid supply side area, andthereafter, the chemical liquid is supplied to the counter washing area521 c from the non-liquid supply side area by the rotation of thesubstrate W. Thus, a sufficient quantity of fresh chemical liquid issupplied to the counter washing area 521 c which has not beenconventionally supplied with a sufficient quantity of fresh(uncontaminated) chemical liquid. To achieve such an entry of thechemical liquid, as described above, the angle formed between thedischarge direction 631 of the single tube nozzle 63 and the extensiondirection (rotary axis) of the upper roll washing member 52 is mostpreferably 90°, but it is desirable to be within range of at least90°±30°.

Seventh Embodiment

A seventh embodiment is also intended to solve the same problems as thesixth embodiment. FIG. 18 is a plan view of a roll washing deviceaccording to a seventh embodiment, FIG. 19 is a cross-sectional viewtaken from a line A-A′ of FIG. 18, FIG. 20 is a partially enlarged viewof FIG. 19, and FIG. 21 is a cross-sectional view taken from a line B-B′of FIG. 18. As illustrated in FIG. 18, the roll washing device includesfour spray nozzles 71 to 74. All the spray nozzles 71 to 74 are nozzleswhich spray a washing liquid in a conical shape. All the spray nozzles71 to 74 supply the washing liquid to the roll winding side area of thesubstrate W. The spray nozzles 71 and 74 spray the rinse liquid as thewashing liquid, and the spray nozzles 72 and 73 spray the chemicalliquid as the washing liquid. The liquid-landing areas of the rinseliquid sprayed from the spray nozzles 71 and 74 reach the upper rollwashing member 52, and a part of the rinse liquid is directly sprayed tothe upper roll washing member 52. In addition, as the spray nozzles 71to 74, instead of the nozzle which sprays the washing liquid in aconical shape, it is also possible to adopt a nozzle which sprays therinse liquid in a fan shape and an asymmetric fan-shaped spray nozzle inwhich a direction of a maximum flow rate (spraying quantity) is shiftedfrom the center of the sprayed rinse liquid.

The washing device of this embodiment further includes spray nozzles 66and 67 which directly spray the chemical liquid to the roll scrapingside of the upper roll washing member 52 from the roll scraping side ofthe substrate W. The spray nozzles 66 and 67 are fan-shaped spraynozzles. As illustrated in FIG. 18, the spray nozzle 66 sprays thechemical liquid to the roll scraping side of the upper roll washingmember 52 in the roll scraping downstream area R_(O)−W_(D), and thespray nozzle 67 sprays the chemical liquid to the roll scraping side ofthe upper roll washing member 52 in the roll scraping upstream areaR_(O)−W_(U). As illustrated in FIGS. 19 and 21, each of the spraynozzles 66 and 67 sprays the chemical liquid to the middle stageposition in the height direction of the upper roll washing member 52. Inaddition, the nozzle, which directly supplies the chemical liquid to theroll scraping side of the upper roll washing member 52, is not limitedto the spray nozzle, and may be a porous nozzle or a slit nozzle.

As illustrated in FIG. 19, the chemical liquid supplied to the rollwinding side upstream area R_(I)−W_(U) from the spray nozzle 72 does notreach the counter washing area 521 c by the rotation of the substrate W,and flows so as to be away from the counter washing area 521 c.

Also, as described above, in the conventional washing device, theprotrusions of the roll washing member 52 reaching the counter washingarea 521 c are immersed with the rinse liquid in advance, and since theprotrusions are crushed by the counter washing area 521 c and theimmersed rinse liquid is discharged from the protrusions, the washingliquid from the roll scraping downstream area R_(O)−W_(D) as anon-liquid supply area is hard to enter the counter washing area 521 c.

According to the washing device of this embodiment, the protrusionscrushed by the counter washing area 521 c are released by rotation andhave the bulging shapes, and thus, it enters a state of easily absorbingthe liquid. Then, as illustrated in FIG. 19, the fresh chemical liquidis supplied to the protrusions of such a state by the spray nozzle 66,and the chemical liquid is immersed into the protrusions. By therotation of the upper roll washing member 52, when the protrusionsimmersed with the chemical liquid reaches the counter washing area 521c, as illustrated in FIG. 20, the protrusions are crushed, and the freshchemical liquid is supplied to the counter washing area 521 c. Also,since the fresh chemical liquid supplied by the spray nozzle 66 is alsoretained between the plurality of protrusions of the upper roll washingmember 52, the fresh chemical liquid is also supplied to the counterwashing area 521 c.

Furthermore, as illustrated in FIG. 19, in the chemical liquid sprayedtoward the upper roll washing member 52 by the spray nozzle 66, thechemical liquid, which is not absorbed or retained by the upper rollwashing member 52, drops on the surface of the substrate W therefrom.The dropped chemical liquid is transported to the counter washing area521 c by the rotation of the substrate W. Thus, even by the droppedchemical liquid, the fresh chemical liquid from the spray nozzle 66 issupplied to the counter washing area 521 c.

As illustrated in FIG. 21, even in the forward washing area 521 f, thechemical liquid sprayed from the spray nozzle 67 is directly sprayed tothe role scraping side of the upper roll washing member 52, and thechemical liquid absorbed or retained in the upper roll washing member 52is supplied to the forward washing area 521 f from the roll winding sideby the rotation of the upper roll washing member 52. Meanwhile, thechemical liquid, which is sprayed from the spray nozzle 67 but drops onthe surface of the substrate W without being absorbed or retained in theupper roll washing member 52, is transported to the counter washing area521 c by the rotation of the substrate W.

As described above, according to the washing device of this embodiment,it is possible to supply a sufficient quantity of fresh chemical liquidto the counter washing area 521 c and to improve the chemical liquidwashing characteristics of the counter washing area 521 c.

In the seventh embodiment, although the chemical liquid is directlysupplied to the upper roll washing member 52 by the spray nozzle 66, theembodiment is not limited to this, and the chemical liquid may bedirectly supplied to the upper roll washing member 52 by the porousnozzle or the slit nozzle.

Eighth Embodiment

An eighth embodiment is also intended to solve the same problems as theseventh embodiment. FIG. 22 is a plan view of a roll washing deviceaccording to the eighth embodiment, and FIG. 23 is a cross-sectionalview taken from a line A-A′ of FIG. 22. As illustrated in FIG. 22, theroll washing device includes two spray nozzles 62 and 64. The spraynozzles 62 and 64 spray the chemical liquid to the roll winding sidearea of the substrate W. Both the spray nozzles 62 and 64 are asymmetricfan-shaped spray nozzles as described in the fourth embodiment. Both themaximum spraying quantity directions 621 and 641 are directed to thecenter O of the substrate W in a plan view. An angle between the maximumspraying quantity directions 621 and 641 is, but not limited to,approximately 90°.

A liquid-landing area of the spray nozzle 62 extends to the outercircumference of the substrate W from the center O of the substrate Walong the counter washing area 521 c. The liquid-landing area of thespray nozzle 64 extends to the outer circumference of the substrate Wfrom the center O of the substrate W along the forward washing area 521f. Both the liquid-landing areas of the spray nozzles 62 and 64 overlapthe upper roll washing member 52, that is, as illustrated in FIG. 23, atleast a part or all of the chemical liquid sprayed from the spraynozzles 62 and 64 directly reaches the roll winding upstream side (rightpart) of the upper roll washing member 52.

Thus, even in this embodiment, by increasing the flow rate of thechemical liquid toward the center O of the substrate W using anasymmetric fan-shaped spray nozzle, the chemical liquid supplied to thevicinity of the center O of the substrate W flows in a direction awayfrom the center O as it is by the inertial force, and flows toward theouter circumference by the centrifugal force after being away from thecenter O. Thus, the collision between the chemical liquid flowing towardthe center O from the outside of the vicinity of the center O and thechemical liquid flowing toward the outer circumference from the vicinityof the center O by the centrifugal force does not occur, and thefluidity is not lowered.

Further, in this embodiment, since at least a part or all of thechemical liquid is directly sprayed to the roll winding upstream side ofthe upper roll washing member 52 from the spray nozzle 62, it ispossible to sufficiently supply a fresh chemical liquid between theprotrusions of the portion and to solve the problems described abovewith reference to FIG. 14.

Hereinafter, although an example of applying the present technique tothe pencil washing device will be described as ninth and tenthembodiments, prior to the description of each embodiment, a generalconfiguration of the pencil washing device will be described.

FIG. 24 is a perspective view illustrating an outline of a pencilwashing device according to an embodiment. As illustrated in FIG. 24, apencil washing device 80 includes, as a substrate rotation mechanism, aplurality of (four in FIG. 24) same spindles 51 as the roll washingdevice 50 described using FIG. 9, a column 56 which is movable up anddown and vertically extends, an arm 57 which is rotatably attached to aleading end of the column 56 at its one end and horizontally extends,and a cylindrical pencil washing member 58 (columnar sponge) which isrotatably attached to the lower surface of the other end of the arm 57.Also, the two washing liquid supply nozzles 54 and 55 are disposed whichare positioned above the substrate W rotated by being supported by thespindle 51 to supply the washing liquid to the surface of the substrateW. The washing liquid supply nozzle 54 is a nozzle which supplies therinse liquid (for example, ultrapure water) to the surface of thesubstrate W, and the washing liquid supply nozzle 55 is a nozzle whichsupplies the chemical liquid to the surface of the substrate W.

The pencil washing member 58 is held by a holding member (notillustrated), is rotatably provided on the lower surface of the leadingend portion of the arm 57, and rotates (turns) about the central axis asa rotary axis by a drive mechanism (not illustrated). The rotary axis isan axis perpendicular to the substrate W. The pencil washing member 58is made of, for example, PVA. When the arm 57 rotates about the column56, the pencil washing member 58 attached to the leading end portion ofthe arm 57 moves over the substrate W while drawing an arc-shapedtrajectory. Since the leading end portion of the arm 57 extends to thecenter O of the substrate W, the movement trajectory of the pencilwashing member 58 passes through the center O of the substrate W.Furthermore, the pencil washing member 58 is moved to the outercircumference of the substrate W. Thus, the movement trajectory of thepencil washing member 58 due to the rotation of the arm 57 becomes acircular arc shape, a radius of which is the length of the arm 57, andits movement range is from the outer circumference of the substrate W tothe point where it passes through the center O of the substrate W.

In a state of horizontally rotating the substrate W by the substraterotation mechanism, while supplying the rinse liquid to the surface ofthe substrate W from the washing liquid supply nozzle 54, and supplyingthe chemical liquid to the surface of the substrate W from the washingliquid supply nozzle 55, the pencil washing member 58 is rotated(turned), the pencil washing member 58 is revolved by rotating the arm57 to be brought into contact with the surface of the substrate W duringrotation, and thus, in the presence of the washing liquid (rinse liquidand chemical liquid), the surface of the substrate W is scrubbed andwashed by the pencil washing member 58.

Hereinafter, the ninth and tenth embodiments will be described, but eachof the embodiments differs in the configuration of the washing liquidsupply nozzle.

Ninth Embodiment

FIG. 25 is a plan view of a washing device in a ninth embodiment. InFIG. 25, the spindle 51, the column 56 and the arm 57 are notillustrated. Moreover, the movement trajectory of the pencil washingmember 58 as described above has a circular arc shape which has the arm57 as a radius, but when the arm 57 is sufficiently long, since thetrajectory of the pencil washing member 58 can be regarded as asubstantially linear shape, in FIG. 25, the movement trajectory of thepencil washing member 58 is illustrated by a straight line. In FIG. 25,the substrate W rotates in a counterclockwise direction.

The washing device includes a single tube nozzle 81 which discharges therinse as a washing liquid, and a single tube nozzle 83 which dischargesthe chemical liquid as a washing liquid. The single tube nozzles 81 and83 discharge the washing liquid toward the surface (upper surface) ofthe substrate W from the outside of the upper space of the substrate Wabove the substrate W. That is, the single tube nozzles 81 and 83 supplythe washing liquid to the surface of the substrate W obliquely from thetop. The rinse liquid may be ultrapure water (DIW), and may befunctional water such as hydrogen water. Solution (acidic chemicalliquid or weak alkaline chemical liquid) other than electrolytic liquid(liquid in the vicinity of pH 7) is used as the chemical liquid. Organicacids, for example, such as citric acid or oxalic acid are used as theacidic chemical liquid, and for example, organic alkali is used as theweak alkaline chemical liquid.

The positions, the discharge directions, the bore diameters and the flowspeed of the single tube nozzles 81 and 83 are set under the sameconditions as described for the single tube nozzle 41 in the firstembodiment, respectively. In addition, the single tube nozzle 81 is setso that the discharge direction is directed to the center O of thesubstrate W in a plan view and the liquid-landing position becomes thefront of the center O of the substrate W. However, both the single tubenozzles 81 and 83 supply the rinse liquid to the upstream side in therotational direction of the substrate W from the movement trajectory ofthe pencil washing member 58. That is, the single tube nozzles 81 and 83discharge the rinse liquid so that the liquid-landing position becomesthe upstream side of the trajectory of the pencil washing member 58. Anangle σ between the discharge directions 811 and 831 of the single tubenozzles 81 and 83 is approximately 30° in a plan view, but the angle σis not limited to 30°.

The washing device is further provided with a spray nozzle 82 whichsprays the rinse liquid as a washing liquid, and a spray nozzle 84 whichsprays the chemical liquid as a washing liquid. These spray nozzles 82and 84 also supply the chemical liquid to the upstream side in therotational direction of the substrate W from the movement trajectory ofthe pencil washing member 58. Although the spray nozzles 82 and 84 areapproximately at the same positions as those of the single tube nozzles81 and 83 in a plan view, respectively, in a manner similar to thatillustrated in FIG. 3( b), the incident angles of the spray nozzles 82and 84 are greater than the incident angles of the single tube nozzles81 and 83, and the spray nozzles 82 and 84 spray the washing liquid fromthe further upper part.

Both the spray nozzles 82 and 84 are asymmetric fan-shaped spray nozzlesas described in the fourth embodiment, and the positions, the injectiondirections or the like are the same as those of the spray nozzles 44 and45 described in the modified example (FIG. 8) of the fourth embodiment.That is, the maximum spraying quantity directions 821 and 841 aredirected to the center O of the substrate W in a plan view. An anglebetween the maximum spraying quantity directions 821 and 841 is alsoapproximately 30°. The liquid-landing areas of the spray nozzles 82 and84 extend to the outer circumference of the substrate W from the washingarea 521 near the center O of the substrate W.

The single tube nozzle 81 and the spray nozzle 82, which supply therinse liquid, supply the washing liquid to the upstream side in therotational direction of the substrate W than the single tube nozzle 83and the spray nozzle 84 which supply the chemical liquid. In particular,the liquid-landing area of the spray nozzle 84 which sprays the chemicalliquid becomes a position just before (upstream) of the movementtrajectory along the movement trajectory of the pencil washing member58. By supplying both the rinse liquid and the chemical liquid to thesurface of the substrate W, on the surface of the substrate W thatpasses through the movement trajectory of the pencil washing member 58,there is a state where the chemical liquid and the rinse liquid aremixed with each other. In addition, on the downstream side in therotational direction of the substrate W from the movement trajectory ofthe pencil washing member 58, the washing liquid which passed throughthe movement trajectory of the pencil washing member 58 is dischargedfrom the outer circumference of the substrate W, by the centrifugalforce due to the rotation of the substrate W.

According to the washing device of this embodiment, it is possible tosupply a sufficient quantity of fresh washing liquid to the position atwhich scrubbing and washing are performed by the pencil washing member58.

Tenth Embodiment

FIG. 26 is a plan view of a washing device in a tenth embodiment. Inthis embodiment, only arrangements of single tube nozzles 81 and 83 anda spray nozzle 82 in a plan view are different from those of the ninthembodiment, and other configurations are the same as those of the ninthembodiment. In this embodiment, the single tube nozzles 81 and 83 areprovided on the upstream side in the rotational direction of thesubstrate W than the spray nozzles 82 and 84. The discharge directions811 and 831 of the single tube nozzles 81 and 83 are directed to thecenter O of the substrate W in a plan view, similarly to the ninthembodiment. Also, a maximum spraying quantity direction 821 of the spraynozzle 82 is directed to the center O of the substrate W in a plan view.

In this embodiment, as compared with the ninth embodiment, an anglebetween the discharge directions 811 and 831 of the single tube nozzles81 and 83, and an angle between the maximum spraying quantity directions821 and 841 of the spray nozzles 82 and 84 are smaller than the case ofthe ninth embodiment, respectively. Thus, it is possible to avoid orreduce a situation in which the washing liquid discharged from thesingle tube nozzles 81 and 83 oppose each other on the surface of thesubstrate W and the flow of the washing liquid is disturbed, andsimilarly, it is possible to avoid or reduce a situation in which thewashing liquid sprayed from the spray nozzles 82 and 84 oppose eachother on the surface of the substrate W, and the flow of the washingliquid is disturbed.

In the ninth and tenth embodiments, the washing liquid is supplied tothe upstream side in the rotational direction of the substrate W thanthe pencil washing member 58, but not limited thereto, and the washingliquid may be supplied to the downstream side in the rotationaldirection of the substrate W than the pencil washing member 58.

Eleventh Embodiment

FIG. 27 is a plan view of a washing device in an eleventh embodiment,and FIG. 28 is a diagram in which the longitudinal direction of the arm57 is viewed from the side. In the washing device of this embodiment,the pencil washing member 58 is supported on the leading end portion ofthe arm 57. The pencil washing member 58 washes the upper surface of thesubstrate W, by rotating about a central axis perpendicular to thesubstrate W and simultaneously by moving while sliding on the uppersurface of the substrate W from the center of the substrate W to theouter circumference by the rotation of the arm 57. On the outer side ofthe outer circumference of the substrate W, a single tube nozzle 81which discharges the rinse as the washing liquid, a spray nozzle 82which sprays the rinse liquid as the washing liquid, and a spray nozzle84 which sprays the chemical liquid as the washing liquid are providedby the arrangement similar to the ninth embodiment (see FIG. 25).

In this embodiment, the arm 57 is further provided with a spray nozzle85 which sprays the chemical liquid as the washing liquid. In this way,the washing liquid supply nozzle, which is fixed to the arm 57 andoscillates by the rotation of the arm 57, is referred to as an on-armwashing liquid supply nozzle. The on-arm spray nozzle 85 is provided inthe vicinity of the pencil washing member 58. Specifically, the spraynozzle 85 is provided adjacent to the pencil washing member 58, on theupstream side of the rotation of the substrate W with respect to thepencil washing member 58.

As illustrated in FIG. 28, the spray direction of the spray nozzle 85 isslightly inclined toward the pencil washing member 58. FIG. 29 is adiagram illustrating the liquid-landing area of the spraying using thespray nozzle 85. As illustrated in FIG. 29, the spray nozzle 85 is anozzle which sprays the washing liquid in a fan shape, and, as describedabove, since its spray direction is slightly inclined toward the pencilwashing member 58, the washing liquid sprayed from the spray nozzle 85spreads in the radial direction of the pencil washing member 58 andlands between the spray nozzle 85 and the pencil washing member 58.

As the on-arm washing liquid supply nozzle, it is also possible to adopta single tube nozzle, but in the case of the single tube nozzle, whendischarging the washing liquid toward the pencil washing member 58, thewashing liquid becomes a lump and is locally supplied to the pencilwashing member 58. Then, the washing liquid is repelled by the pencilwashing member 58, and the washing liquid supplied to the lower surface(washing surface) of the pencil washing member 58 as a washing locationdecreases. In comparison, when the spray nozzle 85 is used as a washingliquid supply nozzle provided to be inclined in a direction toward thepencil washing member 58 in the vicinity of the pencil washing member58, since the washing liquid is supplied in a relatively wide rangearound the pencil washing member 58, such problems are reduced.

Further, in this embodiment, since the on-arm spray nozzle 85 isprovided on the upstream side in the rotational direction of thesubstrate W with respect to the pencil washing member 58 to spray thewashing liquid toward the pencil washing member 58, it is possible toprovide the just sprayed and land fresh washing liquid to asliding-contact position (washing location) between the pencil washingmember 58 and the substrate W.

In this embodiment, although the washing liquid is supplied to a regionincluding the center of the substrate W from the outside of thesubstrate W as well as the on-arm washing liquid supply nozzle, this isto prevent a situation in which the washing liquid is not supplied tothe central portion of the substrate W and the upper surface of thesubstrate W is dried, only in the on-arm spray nozzle 85, when thepencil washing member 58 and the spray nozzles 85 moving integrallytherewith are located on the outer circumferential side of the substrateW. Therefore, in the case of providing the on-arm washing nozzle in thepencil washing member 58, when the washing liquid is always supplied tothe central portion of the substrate W by at least one washing nozzlewhich is fixedly provided, it is possible to prevent the drying of theentire surface of the substrate W. Thus, this case is desirable.

In addition, similarly to the embodiment described above, the chemicalliquid may be supplied from the on-arm washing liquid supply nozzle, andthe rinse liquid and/or the chemical liquid may be supplied from theoutside of the substrate W. Further, the rinse liquid may be suppliedfrom the on-arm washing nozzle, and the chemical liquid and/or the rinseliquid may be supplied from the outside of the substrate W. Also, thesupply of the washing liquid from the outside of the substrate W may beprovided by the spray nozzle, by the single tube nozzle, or by both ofthem similarly to the above-mentioned embodiments.

In addition, it is desirable that the pencil washing member 58 rotate sothat the side (the upstream side in the rotational direction of thesubstrate W) supplied with the washing liquid by the on-arm washingliquid supply nozzle moves outward in the radial direction of thesubstrate, that is, rotate in the same direction as the substrate W in aplan view (counterclockwise direction in the case of FIG. 28). In thecase of this rotational direction, in the chemical liquid suppliedtoward the pencil washing member 58 from the upstream side of the pencilwashing member 58 by the spray nozzle 85, the washing liquid repelled onthe side surface of the pencil washing member 58 is easily dischargedtoward the outer circumference of the substrate W by the rotation of thepencil washing member 58.

Twelfth Embodiment

FIG. 30 is a plan view of a washing device in a twelfth embodiment, FIG.31 is a partially enlarged view of FIG. 30, and FIG. 32 is a diagram inwhich the longitudinal direction of the arm 57 is viewed from the side.In the washing device of this embodiment, a two-fluid jet (2FJ) nozzle59 is supported at the leading end portion of the arm 57. Also, in thisembodiment, the arm 57 is also provided with an on-arm spray nozzle 86which sprays the chemical liquid as the washing liquid.

Also, on the outer side of the substrate W, a single tube nozzle 81 isprovided to discharge the rinse liquid as the washing liquid. Similarlyto the above-described embodiments, the single tube nozzle 81 dischargesthe rinse liquid so that the rinse liquid lands in front of the centerof the substrate W and the landed rinse liquid flows toward the centerof the substrate W.

As clearly illustrated in FIG. 31, the spray nozzle 86 is provided inthe vicinity of the 2FJ nozzle 59, and is provided to be closer to thecenter of the substrate W than the 2FJ nozzle 59 and on the upstreamside in the rotational direction of the substrate W than the 2FJ nozzle59. The spray nozzle 86 is a cone spray nozzle which sprays the chemicalliquid in a conical shape. The chemical liquid injected from the spraynozzle 86 lands (contacts) on the upstream side of the rotation of thesubstrate W with respect to the position just below the 2FJ nozzle 59.

As illustrated in FIG. 32, the spray nozzle 86 is provided to beslightly inclined toward the 2FJ nozzle 59. As mentioned above, sincethe spray nozzles 86 is provided on the central side of the substrate Wwith respect to the 2FJ nozzle 59, and on the upstream side of therotation of the substrate W, the chemical liquid is sprayed from thespray nozzle 86 to the outside of the substrate W and toward thedownstream side of the rotation of the substrate W.

The meaning of providing the spray nozzle 86 in the vicinity of the 2FJnozzle 59 to supply the chemical liquid will be described. One is that,by always supplying the fresh chemical liquid to the vicinity of thelocation at which the jet flow from the 2FJ nozzle 59 collides with thesubstrate W, particles lifted-up from the surface of the substrate W bythe chemical liquid are rapidly removed by the flow of the jet flow, orthe particles detached from the substrate W surface by the physicalaction of the jet flow are removed without adhering to the substrate Wagain by the action of the chemical liquid. Another meaning is theeffect of preventing charging of the substrate W. In the 2FJ nozzle 59,the liquid is mixed with the gas to generate a jet flow, and the surfaceof the substrate W is washed by blowing it to the surface of thesubstrate W. However, when using ultrapure water (DIW) as a liquid atthis time, by the jet flow colliding with the surface of the substrateW, the surface of the substrate W may be charged. Thus, in order toavoid such a charge, carbon dioxide water has been conventionally usedas the liquid for generating the jet flow. However, cost of the carbondioxide water is higher than that of the ultrapure water.

In this embodiment, the spray nozzle 86 is provided in the vicinity ofthe 2FJ nozzle 59 to supply the chemical liquid to the vicinity of thewashing location at which the jet flow collides with the substratesurface. Since the chemical liquid itself has conductivity, whenadopting such a chemical liquid, even if, for example, relatively cheapultrapure water (DIW) rather than the carbon dioxide water is adopted asthe liquid injected from the 2FJ nozzle 59, (since the chemical liquidhas conductivity) the charge of the substrate W is not reduced.

Also, even in this embodiment, similarly to the eleventh embodiment,since the on-arm spray nozzle 86 is slightly inclined in the directiontoward the washing location by the 2FJ nozzle 59 to perform thespraying, it is possible to sufficiently supply the chemical liquid tothe washing location at which the jet flow collides with the substrateW. Further, in this embodiment, since the spray nozzle 86 is alsoinclined outward in the radial direction of the substrate W, it ispossible to smoothly discharge the chemical liquid sprayed from thespray nozzle 86 toward the outer edge of the substrate W by thecentrifugal force due to the rotation of the substrate W.

FIG. 33 is a plan view of a washing device in a modified example of thetwelfth embodiment. In this modified example, a spray nozzle 71 ratherthan the single tube nozzle is provided outside the substrate W. Thespray nozzle 71 is provided to spray the rinse liquid toward the centerof the substrate W, so that the liquid-landing area is applied to thecenter from the front of the center of the substrate W and the landedrinse liquid flows toward the center of the substrate W.

In addition, the single tube nozzle 81 is provided outside the substrateW in the above-described embodiment, and the spray nozzle 71 is providedoutside the substrate W in the modified example thereof. However, sincethe liquid injected from the 2FJ nozzle 59 spreads in all directionsfrom the injection position, in a case where the liquid injected fromthe 2FJ nozzle 59 reaches the center of the substrate W even when the2FJ nozzle 59 moves to the outer edge of the substrate W, it is possibleto prevent the drying from the vicinity of the center of the substrate Weven if the washing liquid supply nozzle is not provided outside thesubstrate W. Thus, in this case, a configuration in which the washingliquid supply nozzle is not provided outside the outer circumference ofthe substrate W apart from the on-arm spray nozzle 86 may be adopted.

Thirteenth Embodiment

FIG. 34 is a plan view of a washing device in a thirteenth embodiment,FIG. 35 is a partially enlarged view of FIG. 34, and FIG. 36 is adiagram in which the longitudinal direction of the arm 57 is viewed fromthe side. In the washing device of this embodiment, similarly to thetwelfth embodiment, the 2FJ nozzle 59 is also provided at the leadingend portion of the arm 57. Also, in this embodiment, similarly totwelfth embodiment, the arm 57 is also provided with an on-arm spraynozzle 87 which sprays the chemical liquid as the washing liquid.

Also, on the outer side of the substrate W, the single tube nozzle 81which discharges the rinse liquid as the washing liquid is provided.Similarly to the above-mentioned embodiments, the single tube nozzle 81discharges the rinse liquid so that the rinse liquid lands in front ofthe center of the substrate W and the landed rinse liquid flows towardthe center of the substrate W.

As clearly illustrated in FIG. 35, the spray nozzle 87 is provided inthe vicinity of the 2FJ nozzle 59, and is provided to be closer to thecenter of the substrate W than the 2FJ nozzle 59 and on the downstreamside in the rotational direction of the substrate W than the 2FJ nozzle59. The spray nozzle 87 is a cone spray nozzle which sprays the chemicalliquid in a conical shape. The chemical liquid injected from the spraynozzle 87 lands (contacts) on the downstream side of the rotation of thesubstrate W with respect to the position just below the 2FJ nozzle 59.

As illustrated in FIG. 36, the spray nozzle 87 is provided to beslightly inclined toward the 2FJ nozzle 59. As mentioned above, sincethe spray nozzle 87 is provided on the central side of the substrate Wwith respect to the 2FJ nozzle 59 and on the downstream side of therotation of the substrate W, the chemical liquid is sprayed from thespray nozzle 87 toward the outer side of the substrate W and theupstream side of the rotation of the substrate W.

By providing the spray nozzle 87 near the 2FJ nozzle 59 to supply thechemical liquid, even when using the ultrapure water (DIW) as the liquidto be injected with gas from the 2FJ nozzle 59, similarly to the twelfthembodiment, it is possible to reduce or prevent the charging of thesubstrate W. In this embodiment, by further providing the spray nozzle87 on the downstream side in the rotational direction of the substrate Wthan the 2FJ nozzles 59, the following advantageous effects areobtained.

As mentioned above, the spray nozzle 87 is provided in the vicinity ofthe 2FJ nozzle 59, and the chemical liquid is supplied from the spraynozzle 87 to the vicinity of the washing location at which the jet flowof gas and liquid injected from the 2FJ nozzle 59 collides with theupper surface of the substrate W. However, when the layer of thechemical liquid supplied from the spray nozzle 87 is too thick at thewashing location, the layer of the chemical liquid becomes a cushion,and the washing of the upper surface of the substrate W by the jet flowbecomes insufficient.

Therefore, in this embodiment, the liquid-landing area by the spraynozzle 87 is disposed on the downstream side in the rotational directionof the substrate W than the washing location by the jet flow of the 2FJnozzle 59. Thus, the chemical liquid supplied to the upper surface ofthe substrate W from the spray nozzle 87 is conveyed in a direction awayfrom the washing location by the rotation of the substrate W. Thus, itis possible to reduce or avoid the insufficient washing due to thecushion effect of the layer of the chemical liquid, without the layer ofthe chemical liquid becoming too thick at the washing location.

Also, even in this embodiment, similarly to the twelfth embodiment,since the spray nozzle 87 is inclined outward in the radial direction ofthe substrate W, the chemical liquid sprayed from the spray nozzle 87can be smoothly discharged toward the outer edge of the substrate W bythe centrifugal force due to rotation of the substrate W. In addition,in the twelfth and thirteenth embodiments, although the arm 57 isprovided with the on-arm spray nozzle 86 or 87 which sprays the chemicalliquid as a washing liquid, the single tube nozzle which supplies thechemical liquid in place of the spray nozzle may be provided.

FIG. 37 is a plan view of a washing device in a modified example of thethirteenth embodiment. In this modified example, a spray nozzle 71rather than a single tube nozzle is provided outside the substrate W.The spray nozzle 71 is provided to spray the rinse liquid toward thecenter of the substrate W so that the liquid-landing area is applied tothe center from the front of the center of the substrate W and thelanded rinse liquid flows toward the center of the substrate W. Otherconfigurations are the same as those of the above embodiments.

Also, even in this embodiment, similarly to the twelfth embodiment, whenthe liquid injected from the 2FJ nozzle 59 reaches the center of thesubstrate W, apart from the on-arm spray nozzle 87, a washing liquidsupply nozzle may not be provided outside the substrate W.

Fourteenth Embodiment

FIG. 38 is a plan view of a washing device in a fourteenth embodiment.In the washing device of the present embodiment, although the 2FJ nozzle59 is provided at the leading end portion of the arm 57, the on-armwashing nozzle is not provided. On the outer side of the substrate W, asingle tube nozzle 83 which discharges the chemical liquid as thewashing liquid is provided. Similarly to the above-mentionedembodiments, the single tube nozzle 83 discharges the chemical liquid sothat the chemical liquid lands in front of the center of the substrate Wand the landed chemical liquid flows toward the center of the substrateW. Thus, the liquid flow of the chemical liquid is formed in thevicinity of the center of the substrate W, and the chemical liquid doesnot stagnate in the vicinity of the center of the substrate W.

FIG. 39 is a plan view of a washing device in a modified example of thefourteenth embodiment. In this modified example, instead of the singletube nozzle 83, the spray nozzle 73 is used which sprays the chemicalliquid as the washing liquid. The spray nozzle 73 is provided to spraythe chemical liquid toward the center of the substrate W so that theliquid-landing area is applied to the center from the front of thecenter of the substrate W and the landed chemical liquid flows towardthe center of the substrate W. Even when using such a spray nozzle 73,the chemical liquid is prevented from stagnating in the vicinity of thecenter of the substrate W.

Fifteenth Embodiment

FIG. 40 is a side view of a washing device in a fifteenth embodiment. Inthe present embodiment, a 2FJ nozzle 59′ is also provided on the otherend side (leading end portion) of the arm 57, one end of which isrotatably supported on the column 56. The 2FJ nozzle 59′ is provided tobe inclined outward in the radial direction of the substrate W ratherthan being directed in the vertical direction similarly to theabove-mentioned embodiments.

According to the washing device of this embodiment, since the liquidcontained in the jet flow collides with the substrate W with theradially outward flow of the substrate W, the liquid after collisionwith the upper surface of the substrate W flows towards the outer edgeof the substrate W, is also combined with the centrifugal force due torotation of the substrate W, and is smoothly discharged from the outeredge of the substrate W.

In addition, similarly to the twelfth and thirteenth embodiments,together with the 2FJ nozzle 59′ having the above-mentionedconfiguration, an on-arm washing nozzle may be provided. In addition, inthe above, the description has given of a case where, when using the 2FJnozzle and providing the on-arm washing nozzle, there is no need toprovide a nozzle which supplies the washing liquid toward the center ofthe substrate W from the outside of the substrate W. However, as in thisembodiment, when the 2FJ nozzle 59′ is inclined outward in the radialdirection of the substrate W, since the flow of the liquid injected fromthe 2FJ nozzle 59′ toward the center of the substrate W weakens,similarly to the above-described embodiments, it is desirable to provideone or more of the single tube nozzle 81 and/or the spray nozzle 71 onthe outer side of the substrate W.

Sixteenth Embodiment

FIG. 41 is a perspective view of a washing device of a sixteenthembodiment. Similarly to the pencil washing device 80 described abovewith reference to FIG. 24, a pencil washing device 80′ of thisembodiment includes four spindles 51 as substrate rotation mechanisms, acolumn 56 which is movable up and down and vertically extends, an arm 57which is rotatably attached to the leading end portion of the column 56at one end and horizontally extends, and a cylindrical pencil washingmember 58 which is rotatably mounted on the lower surface of the otherend of the arm 57.

In the pencil washing device 80′ of this embodiment, a washing liquidsupply nozzle 88 is disposed which is located above the substrate Wrotated by being supported on the spindles 51 to supply the washingliquid to the surface of the substrate W. However, the washing liquidsupply nozzle 88 has upper and lower supply ports of two stages. Thewashing liquid supply nozzle 88 of this embodiment is a spray nozzle inwhich both two supply ports 5411 and 5412 spray the washing liquid in afan shape.

As illustrated in FIG. 41, the washing liquid supplied from the uppersupply port 5412 lands on the upstream side of the scan area SA alongthe scan area SA of the pencil washing member 58. The washing liquidsupplied from the lower supply port 5411 lands on the upstream side ofthe liquid-landing area of the upper supply port 5412 and in a regionextending in a radial direction of the substrate W. The liquid-landingarea of the lower supply port 5411 reaches the periphery of thesubstrate W, without reaching the center of the substrate W.

In some embodiments, although an example in which the two washing liquidsupply nozzles are provided adjacent to each other has been described,when providing the two washing liquid supply nozzles adjacent to eachother as in this example, washing liquid each readily interfere witheach other prior to landing on the upper surface of the substrate W, andit is not easy to perform the adjustment for avoiding the interference.In contrast, by using one washing liquid supply nozzle having the upperand lower supply ports of two stages as in this embodiment, it ispossible to avoid the difficulty of such adjustment and to supply thewashing liquid to the upper surface of the substrate W from the twolocations so as not to interfere with each other.

In this embodiment, both the two supply ports 5411 and 5412 of thewashing liquid supply nozzle 88 function as a spray nozzle which spraysthe washing liquid in a fan shape, but not limited thereto, and one maybe a single tube nozzle, the other may be a spray nozzle, and both maybe a single tube nozzle. Although both the on-arm washing liquid supplynozzles are provided on the lower surface of the arm 57, the on-armwashing liquid supply nozzles may be externally attached to the lateralsurface of the arm or the surface of the leading end side. Also, thewashing liquid supply nozzle 88 may be another stage nozzle of three ormore stages having three or more supply ports. Also, the same washingliquid may be each supplied from the plurality of the supply ports ofthe washing liquid supply nozzle 88, and the different types of liquid(for example, chemical liquid and rinse liquid) from each other may besupplied.

Further, in the first to sixteenth embodiments, although the washingdevice configured to perform washing in the CMP process has beendescribed, the washing device is also applied to, for example, amanufacturing process of a flat panel, a manufacturing process of animage sensor such as CMOS or CCD, and a manufacturing process of an MRAMmagnetic film.

Furthermore, in the first to sixteenth embodiments, although thesubstrate W rotates by being horizontally held, but, not limitedthereto, in the washing device, the substrate may be rotated while thesurface of the substrate W is inclined from the horizontal direction.Further, the substrate rotation mechanism is not also limited to that ofa plurality of spindles, and may have a configuration in which aplurality of chuck members for holding the outer circumferential portionof the substrate is included and the chuck members rotate about thecentral axis of the substrate as the rotary axis, and may have aconfiguration in which a holding table for placing the substrate W isincluded and the holding table rotates about the central axis of thesubstrate as the rotary axis.

What is claimed is:
 1. A washing device comprising: a substrate rotationmechanism configured to hold a substrate and rotate the substrate abouta central axis of the substrate as a rotary axis; and a first singletube nozzle configured to discharge a first washing liquid toward anupper surface of the substrate held by the substrate rotation mechanism,wherein the first single tube nozzle discharges the first washing liquidso that the first washing liquid lands in front of the center of thesubstrate and the landed first washing liquid flows on the upper surfaceof the substrate toward the center of the substrate, and a liquid flowon the upper surface of the substrate after landing of the first washingliquid discharged from the first single tube nozzle passes through thecenter of the substrate.
 2. The washing device according to claim 1,wherein an incident angle of a discharge direction of the first singletube nozzle with respect to the upper surface of the substrate is 45° orless.
 3. The washing device according to claim 1, wherein a distancefrom a liquid-landing position of the first washing liquid to thesubstrate to the center of the substrate is smaller than one-third of aradius of the substrate.
 4. The washing device according to claim 1,further comprising: a spray nozzle configured to spray a second washingliquid toward the upper surface of the substrate held by the substraterotation mechanism, wherein discharging of the first washing liquid bythe first single tube nozzle and spraying of the second washing liquidby the spray nozzle are simultaneously performed.
 5. The washing deviceaccording to claim 4, wherein the liquid-landing position of the secondwashing liquid is located on an upstream side in a rotational directionof the substrate from the liquid-landing position of the first washingliquid.
 6. The washing device according to claim 4, wherein a maximumspraying quantity direction in which a spraying quantity in the spraynozzle is maximized is shifted closer to the center of the substratefrom the spray center.
 7. The washing device according to claim 6,wherein the spray nozzle sprays the second washing liquid oversubstantially the entire length of the radius of the substrate, and themaximum spraying quantity direction is directed toward the center of thesubstrate or the vicinity of the center.
 8. The washing device accordingto claim 1, further comprising: a second single tube nozzle configuredto discharge a third washing liquid toward the upper surface of thesubstrate held by the substrate rotation mechanism, wherein the secondsingle tube nozzle discharges the third washing liquid so that the thirdwashing liquid lands beyond the center of the substrate and flows towardthe outer circumference of the substrate from the liquid-landingposition, and a distance from the liquid-landing position of the thirdwashing liquid to the center of the substrate is greater than a distancefrom the liquid-landing position of the first washing liquid to thecenter of the substrate, and the liquid-landing position of the thirdwashing liquid is located on the downstream side in the rotationaldirection of the substrate from the liquid-landing position of the firstwashing liquid.
 9. The washing device according to claim 1, furthercomprising: a roll washing member configured to linearly extend oversubstantially the entire length of the diameter of the substrate andcome into slide-contact with the upper surface of the substrate, whilerotating about a central axis parallel to the substrate, wherein thefirst single tube nozzle lands the first washing liquid against a rollwinding side area of the roll washing member.
 10. The washing deviceaccording to claim 9, wherein an angle formed between a dischargedirection of the first single tube nozzle and an extension direction ofthe roll washing member is 90°±30° in a plan view.
 11. The washingdevice according to claim 9, further comprising: a nozzle configured todirectly supply a fourth washing liquid to the surface of the rollwashing member located on a roll scraping side area of the roll washingmember.
 12. The washing device according to claim 1, further comprising:a pencil washing member which is supported on a leading end of an arm,rotates about a central axis perpendicular to the substrate, and movestoward the outer circumference from the center of the substrate by therotation of the arm, while coming into slide-contact with the uppersurface of the substrate, wherein the first single tube nozzle lands thefirst washing liquid on the upstream side in the rotational direction ofthe substrate from a movement trajectory of the pencil washing member.13. The washing device according to claim 1, further comprising: apencil washing member or a two-fluid jet nozzle which is supported onthe leading end of the arm and moves toward the outer circumference fromthe center of the substrate by the rotation of the arm; and an on-armwashing liquid supply nozzle which is provided in the arm to supply thewashing liquid to the upper surface of the substrate in the vicinity ofthe pencil washing member or the two-fluid jet nozzle.
 14. The washingdevice according to claim 13, wherein the on-arm washing liquid supplynozzle is inclined to supply the washing liquid toward a washinglocation of the substrate by the pencil washing member or the two-fluidjet nozzle.
 15. The washing device according to claim 13, wherein thepencil washing member is supported on the leading end of the arm, andthe on-arm washing liquid supply nozzle is provided on the upstream sidein the rotational direction of the substrate with respect to the pencilwashing member.
 16. The washing device according to claim 13, whereinthe two-fluid jet nozzle is supported at the leading end of the arm, andthe on-arm washing liquid supply nozzle is provided on the downstreamside in the rotational direction of the substrate with respect to thetwo-fluid jet nozzle.
 17. The washing device according to claim 13,wherein the on-arm washing liquid supply nozzle is provided at aposition closer to the center of the substrate than the washing locationof the substrate by the pencil washing member or the two-fluid jetnozzle.
 18. A washing device comprising: a substrate rotation mechanismconfigured to hold a substrate and rotate the substrate about a centralaxis of the substrate as a rotary axis; and a spray nozzle configured tospray a second washing liquid in a fan shape toward an upper surface ofthe substrate held by the substrate rotation mechanism, wherein amaximum spraying quantity direction in which a spraying quantity ismaximized in the spray nozzle is shifted close to the center of thesubstrate from the spray center.
 19. A washing device comprising: asubstrate rotation mechanism configured to hold a substrate and rotatethe substrate about a central axis of the substrate as a rotary axis; afirst single tube nozzle configured to discharge a first washing liquidtoward an upper surface of the substrate held by the substrate rotationmechanism; and a spray nozzle configured to spray a second washingliquid toward the upper surface of the substrate held by the substraterotation mechanism, wherein discharging of the first washing liquid bythe first single tube nozzle and spraying of the second washing liquidby the spray nozzle are simultaneously performed.
 20. A washing methodcomprising: rotating a substrate about a central axis of the substrateas a rotary axis; and discharging a first washing liquid toward an uppersurface of the substrate, the first washing liquid being landed in frontof the center of the substrate, and a liquid flow on the upper surfaceof the substrate after landing being passed through the center of thesubstrate.